Si(113) hydrogen desorption kinetics: a temperature programmed desorption study

2001 ◽  
Vol 490 (1-2) ◽  
pp. L602-L608 ◽  
Author(s):  
H. Kim ◽  
T. Spila ◽  
J.E. Greene
1992 ◽  
Vol 270 ◽  
Author(s):  
Michelle T. Schulberg ◽  
Glenn D. Kubiak ◽  
Richard H. Stulen

ABSTRACTThe desorption kinetics of H2, HD, and D2 from a CVD-grown diamond sample have been measured using temperature programmed desorption. The sample was exposed to hydrogen and deuterium at ∼ 100 K. Molecular hydrogen does not react with the diamond surface but atomic hydrogen chemisorbs. The sample is then heated to 1500 K at a rate of 6 K/s. The hydrogen desorption spectrum from these polycrystalline specimens is surprisingly simple, consisting of a single peak near 1270 K for all coverages studied. The width of the desorption peak is ∼ 100 K. Neither the width nor the peak maximum shift with increasing hydrogen coverage. There is no isotope effect to the desorption. No other desorption products (water, small hydrocarbons) are detected. Kinetic parameters can be extracted from these spectra, and these can be compared to hydrogen desorption from natural diamond single crystal surfaces. These parameters can be used to model diamond growth processes.


1998 ◽  
Vol 15 (5) ◽  
pp. 566-569 ◽  
Author(s):  
Myung Hun Kim ◽  
Sun Jin Kim ◽  
Suk Bong Hong ◽  
Gon Seo ◽  
Young Sun Uh

1981 ◽  
Vol 85 (26) ◽  
pp. 4125-4130 ◽  
Author(s):  
Makoto Egashira ◽  
Masayo Nakashima ◽  
Shohachi Kawasumi ◽  
Tetsuro Selyama

Sign in / Sign up

Export Citation Format

Share Document