Airborne Contamination of a Chemically Amplified Resist. 2. Effect of Polymer Film Properties on Contamination Rate
1991 ◽
Vol 9
(6)
◽
pp. 3380
◽
Keyword(s):
2000 ◽
Vol 10
(8)
◽
pp. 1795-1803
◽
2000 ◽
Vol 147
(10)
◽
pp. 3833
◽
2002 ◽
Vol 20
(1)
◽
pp. 164