Ab Initio Chemical Kinetics for SiH2 + Si2H6 and SiH3 + Si2H5 Reactions and the Related Unimolecular Decomposition of Si3H8 under a-Si/H CVD Conditions
2013 ◽
Vol 117
(42)
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pp. 10811-10823
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2013 ◽
Vol 114
(4)
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pp. 278-288
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2010 ◽
Vol 114
(51)
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pp. 13353-13361
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2001 ◽
Vol 115
(11)
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pp. 5117-5125
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2018 ◽
Vol 706
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pp. 280-284
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Keyword(s):
Keyword(s):
2013 ◽
Vol 117
(28)
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pp. 5775-5784
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2016 ◽
Vol 188
(7)
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pp. 1095-1114
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