Ab Initio Chemical Kinetics for SiH2 + Si2H6 and SiH3 + Si2H5 Reactions and the Related Unimolecular Decomposition of Si3H8 under a-Si/H CVD Conditions

2013 ◽  
Vol 117 (42) ◽  
pp. 10811-10823 ◽  
Author(s):  
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M. C. Lin
2010 ◽  
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Author(s):  
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M. C. Lin
Keyword(s):  

2001 ◽  
Vol 115 (11) ◽  
pp. 5117-5125 ◽  
Author(s):  
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A. M. Mebel ◽  
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2018 ◽  
Vol 706 ◽  
pp. 280-284 ◽  
Author(s):  
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Minh v. Duong ◽  
Hieu T. Nguyen ◽  
Kuang C. Lin ◽  
Lam K. Huynh

2016 ◽  
Vol 188 (7) ◽  
pp. 1095-1114 ◽  
Author(s):  
Pham-Cam Nam ◽  
P. Raghunath ◽  
Lam K. Huynh ◽  
Shucheng Xu ◽  
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Keyword(s):  

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