Calibration-free quantitative analysis of thin-film oxide layers in semiconductors using laser induced breakdown spectroscopy (LIBS)
2017 ◽
Vol 32
(7)
◽
pp. 1378-1387
◽
Keyword(s):
Calibration-free LIBS for quantitative analysis of thin film layers for metal oxide semiconductor (MOS) applications.
2017 ◽
Vol 131
◽
pp. 58-65
◽
2009 ◽
Vol 24
(4)
◽
pp. 413
◽
2007 ◽
Vol 62
(3)
◽
pp. 217-223
◽
2011 ◽
Vol 179-180
◽
pp. 1183-1186
◽
2013 ◽
Vol 87
◽
pp. 51-56
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