Real-time depth measurement in glow discharge optical emission spectrometry via differential interferometric profiling

2017 ◽  
Vol 32 (9) ◽  
pp. 1798-1804 ◽  
Author(s):  
S. Gaiaschi ◽  
S. Richard ◽  
P. Chapon ◽  
O. Acher

We developed an in situ measurement technique implemented on a Glow Discharge Optical Emission Spectrometry (GD-OES) instrument, which provides the depth information during the profiling process.

2013 ◽  
Vol 28 (1) ◽  
pp. 121-126 ◽  
Author(s):  
Igor S. Molchan ◽  
George E. Thompson ◽  
Peter Skeldon ◽  
Antonino Licciardello ◽  
Nunzio Tuccitto ◽  
...  

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