Real-time depth measurement in glow discharge optical emission spectrometry via differential interferometric profiling
2017 ◽
Vol 32
(9)
◽
pp. 1798-1804
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Keyword(s):
We developed an in situ measurement technique implemented on a Glow Discharge Optical Emission Spectrometry (GD-OES) instrument, which provides the depth information during the profiling process.
2015 ◽
2011 ◽
2003 ◽
Vol 18
(6)
◽
pp. 584
◽
1994 ◽
Vol 9
(3)
◽
pp. 363
◽
Keyword(s):
1995 ◽
Vol 10
(9)
◽
pp. 671-676
◽
2001 ◽
Vol 16
(2)
◽
pp. 122-128
◽
Keyword(s):
2013 ◽
Vol 28
(1)
◽
pp. 121-126
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