scholarly journals Use of the ultraviolet absorption spectrum of CF2 to determine the spatially resolved absolute CF2 density, rotational temperature, and vibrational distribution in a plasma etching reactor

2004 ◽  
Vol 120 (20) ◽  
pp. 9499-9508 ◽  
Author(s):  
Nicolas Bulcourt ◽  
Jean-Paul Booth ◽  
Eric A. Hudson ◽  
Jorge Luque ◽  
Daniel K. W. Mok ◽  
...  
Author(s):  
Paul Brint ◽  
Jean-Patrick Connerade ◽  
Pericles Tsekeris ◽  
Agisilaos Bolovinos ◽  
Aslam Baig

1958 ◽  
Vol 13 (3) ◽  
pp. 208-217 ◽  
Author(s):  
S Riegelman ◽  
N.A Allawala ◽  
M.K Hrenoff ◽  
L.A Strait

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