Use of the ultraviolet absorption spectrum of CF2 to determine the spatially resolved absolute CF2 density, rotational temperature, and vibrational distribution in a plasma etching reactor
2004 ◽
Vol 120
(20)
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pp. 9499-9508
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1972 ◽
Vol 43
(3)
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pp. 467-471
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Keyword(s):
1986 ◽
Vol 82
(3)
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pp. 367
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2013 ◽
Vol 4
(24)
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pp. 4201-4205
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1958 ◽
Vol 13
(3)
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pp. 208-217
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2011 ◽
Vol 508
(1-3)
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pp. 49-53
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1961 ◽
Vol 34
(1)
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pp. 125-128
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1966 ◽
Vol 45
(5)
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pp. 1685-1690
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