Fabrication of high aspect ratio 100nm metallic stamps for nanoimprint lithography using proton beam writing
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2009 ◽
Vol 86
(4-6)
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pp. 945-948
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2008 ◽
Vol 47
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pp. 8600-8605
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Vol 269
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pp. 2457-2461
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2015 ◽
Vol 69
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pp. 396-402
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2006 ◽
Vol 13
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pp. 431-434
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2008 ◽
Vol 85
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pp. 945-948
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