Micro Roughness Determination Of Periodic Microelectronics Structures Using Optical Far Field Measurements
2003 ◽
Vol 52
(6)
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pp. 1631-1662
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Keyword(s):
2010 ◽
Vol 22
(2)
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pp. 167-191
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2006 ◽
Vol 38
(2)
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pp. 434-451
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1960 ◽
Vol 32
(7)
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pp. 938-939
1963 ◽
Vol 10
(4)
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pp. 531-532