Micro Roughness Determination Of Periodic Microelectronics Structures Using Optical Far Field Measurements

2011 ◽  
Author(s):  
Alexandre Vauselle ◽  
Philippe Maillot ◽  
Gaëlle Georges ◽  
Carole Deumié ◽  
David G. Seiler ◽  
...  
Keyword(s):  
2014 ◽  
Vol 39 (12) ◽  
pp. 3398 ◽  
Author(s):  
Juha-Matti Savolainen ◽  
Lars Grüner-Nielsen ◽  
Poul Kristensen ◽  
Peter Balling

2010 ◽  
Vol 22 (2) ◽  
pp. 167-191 ◽  
Author(s):  
Fioralba Cakoni ◽  
David Colton ◽  
Peter Monk
Keyword(s):  

2011 ◽  
Author(s):  
Alexandre Vauselle ◽  
Philippe Maillot ◽  
Gaëlle Georges ◽  
Carole Deumié
Keyword(s):  

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