Fourier Scatterometry for Characterization of Sub-wavelength Periodic Two Photon Polymerization Structures

2011 ◽  
Author(s):  
K. Frenner ◽  
V. Ferreras Paz ◽  
S. Peterhänsel ◽  
W. Osten ◽  
A. Ovsianikov ◽  
...  
2013 ◽  
Vol 52 (3) ◽  
pp. 388 ◽  
Author(s):  
Rachel Woods ◽  
Sonja Feldbacher ◽  
David Zidar ◽  
Gregor Langer ◽  
Valentin Satzinger ◽  
...  

2020 ◽  
Vol 1003 ◽  
pp. 165-172 ◽  
Author(s):  
Ritu Walia ◽  
Kamal Nain Chopra

This paper presents an Exhaustive Analysis of the Characterization of Photopolymer Material (SZ2080) by Two-Photon Polymerization, and some of the modern concepts like Characterization of Photonic Crystals in Photopolymer SZ2080 by Two-Photon Polymerization, Waves Moving in a Periodic Potential, and Optical Quantum metamaterials. Two-photon polymerization for fabricating three-dimensional subdiffraction-limited structures has been discussed. Experimental and Computed Curves of line thickness (nm) vs feed rate (μm/s) have been technically analyzed. Waves moving in a Periodic Potential and Photonic Crystals have been technically discussed. In addition, Optical Quantum metamaterials have been discussed in terms of quantum coherence, and quantum dots with emphasis on cavity array metamaterial.


Author(s):  
Yinan Tian ◽  
Yung C. Shin ◽  
Galen B. King

Two-photon polymerization is a powerful technique in fabricating three dimensional sub-diffraction-limited structures. Recently, new sol-gel material, SZ2080, was introduced into two-photon polymerization and was proved to be better than the conventional materials for its negligible shrinkage. In this paper, two-photon polymerization was applied to generate woodpile structures, one kind of photonic crystal, using SZ2080. First, the relationship between scanning speed, laser power and resolution was determined through fabricating free-hanging lines. Based on this relationship, woodpile structures with different period distances were fabricated with high uniformity as shown by SEM images. Then optical properties of woodpile structures were investigated using Fourier Transform Infrared Spectroscopy (FTIR) and a quantitative relationship between band gap and period distance was established.


2014 ◽  
Vol 2 (3) ◽  
Author(s):  
Yinan Tian ◽  
Hyukjoon Kwon ◽  
Yung C. Shin ◽  
Galen B. King

Two-photon polymerization (2PP) is a powerful technique in fabricating three-dimensional subdiffraction-limited structures. In this paper, 2PP was applied to generate woodpile structures, one kind of photonic crystal, using SZ2080, which is widely used in 2PP due to its negligible shrinkage. First, the relationship between scanning speed, laser power, and resolution was determined through fabricating free-hanging lines by theoretical and experimental study. Based on this relationship, woodpile structures with different period distances were fabricated with high uniformity as shown by scanning electron microscopy (SEM) images. Then optical properties of woodpile structures were investigated using Fourier transform infrared spectroscopy (FTIR) and a quantitative empirical relationship between period distance and band gaps was established. The empirical relationship can be applied to design woodpile photonic crystals for the optical sensors and filters.


2014 ◽  
Author(s):  
L. J. Jiang ◽  
Y. S. Zhou ◽  
W. Xiong ◽  
Y. Gao ◽  
T. Baldacchini ◽  
...  

2009 ◽  
Vol 113 (38) ◽  
pp. 12663-12668 ◽  
Author(s):  
Tommaso Baldacchini ◽  
Maxwell Zimmerley ◽  
Chun-Hung Kuo ◽  
Eric O. Potma ◽  
Ruben Zadoyan

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