Resolution limit of the white-light interferometric sensor for absolute position measurement based on central fringe maximum identification
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2010 ◽
Vol 48
(4)
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pp. 486-490
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1997 ◽
Vol 133
(1-6)
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pp. 67-71
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1997 ◽
Vol 63
(3)
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pp. 197-203
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1995 ◽
Vol 66
(12)
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pp. 5464-5468
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