Ti–Ni shape memory alloy film-actuated microstructures for a MEMS probe card

2006 ◽  
Vol 17 (1) ◽  
pp. 154-162 ◽  
Author(s):  
Takahiro Namazu ◽  
Youichi Tashiro ◽  
Shozo Inoue
Keyword(s):  
Shape Memory Alloy ◽  
Shape Memory ◽  
Alloy Film ◽  
Probe Card

Ti-Ni Shape Memory Alloy Film Cantilever Actuator for Micro-Probing

2007 ◽  
Vol 539-543 ◽  
pp. 3213-3218
Author(s):  
Takahiro Namazu ◽  
Y. Okamura ◽  
Y. Tashiro ◽  
Shozo Inoue
Keyword(s):  
Shape Memory Alloy ◽  
Shape Memory ◽  
Cantilever Beam ◽  
Contact Force ◽  
Unit Volume ◽  
Alloy Film ◽  
Cantilever Beams ◽  
Titanium Nickel ◽  
Probe Card ◽  
Cantilever Bending

This paper describes novel MEMS probe card device, which is composed of silicon (Si) cantilever beams actuated by titanium-nickel (Ti-Ni) shape memory alloy (SMA) films. Since Ti-Ni SMA film can yield a higher work output per unit volume, Ti-Ni film-actuated Si cantilever beam is expected to be a MEMS probe card device providing large contact force between probe and electrode pad. The developed cantilever beam produces a contact force by not only cantilever bending in contact but also the shape memory effect (SME) of Ti-Ni film arising from Joule’s heating. The SME of Ti-Ni film containing Ti of 50.5 atomic (at.) % to 53.2 at. % can generate an additional contact force of 200 μN on average under applying an electric power of 500 mW to the film. Ti-Ni film-actuated Si cantilever beam would be a key element for successful MEMS probe card with larger contact force and smaller size.

Mesoscale Simulation of Shape Memory Alloy Film Damping

PAMM ◽  
2018 ◽  
Vol 18 (1) ◽  
Author(s):  
Shahabeddin Ahmadi ◽  
Kiran Jacob ◽  
Frank Wendler ◽  
Manfred Kohl
Keyword(s):  
Shape Memory Alloy ◽  
Shape Memory ◽  
Alloy Film ◽  
Mesoscale Simulation

Ti-Ni Shape Memory Alloy Film Cantilever Actuator for Micro-Probing

2007 ◽  
pp. 3213-3218 ◽  
Author(s):  
Takahiro Namazu ◽  
Y. Okamura ◽  
Y. Tashiro ◽  
Shozo Inoue
Keyword(s):  
Shape Memory Alloy ◽  
Shape Memory ◽  
Alloy Film

Two-Directional TiNi Shape Memory Alloy Film

2003 ◽  
Vol 5 (10) ◽  
pp. 732-735 ◽  
Author(s):  
H. Takagi ◽  
K. Okano ◽  
S. Juodkazis ◽  
S. Matsuo ◽  
H. Misawa
Keyword(s):  
Shape Memory Alloy ◽  
Shape Memory ◽  
Alloy Film

The photo-electrical performance of the novel CuAlMnFe shape memory alloy film in the diode application

2021 ◽  
Vol 264 ◽  
pp. 114931
Author(s):  
C. Aksu Canbay ◽  
A. Tataroğlu ◽  
A. Dere ◽  
Abdullah G. Al-Sehemi ◽  
Abdulkerim Karabulut ◽  
...  
Keyword(s):  
Shape Memory Alloy ◽  
Shape Memory ◽  
Alloy Film ◽  
Electrical Performance ◽  
The Novel

scholarly journals Analysis of Thermo-Mechanical Behavior of TiNi-Based Shape Memory Alloy Film Actuator Using Sublayer Model.

2000 ◽  
Vol 66 (643) ◽  
pp. 509-515
Author(s):  
Hirohide AOKI ◽  
Katsuyuki KINOSHITA ◽  
Eiji MATSUMOTO ◽  
Toshinobu SHIBATA
Keyword(s):  
Shape Memory Alloy ◽  
Mechanical Behavior ◽  
Shape Memory ◽  
Alloy Film

scholarly journals Shape memory alloy film damping for smart miniature systems

2018 ◽  
Vol 9 (3) ◽  
pp. 199-215 ◽  
Author(s):  
Shahabeddin Ahmadi ◽  
Kiran Jacob ◽  
Frank Wendler ◽  
Manfred Kohl
Keyword(s):  
Shape Memory Alloy ◽  
Shape Memory ◽  
Alloy Film

Development of TiNi shape memory alloy film deposited by sputtering from separate Ti and Ni targets

1998 ◽  
Author(s):  
Akihiro Ohta ◽  
Shekhar Bhansali ◽  
Isao Kishimoto ◽  
Akira Umeda
Keyword(s):  
Shape Memory Alloy ◽  
Shape Memory ◽  
Alloy Film
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