Abstract
A simple and cost-effective method for the patterning and fabrication of soft polymer microactuators integrated with morphological computation is presented. The microactuators combine conducting polymers to provide the actuation, with spatially designed structures for a morphologically controlled, user-defined actuation. Soft lithography is employed to pattern and fabricate polydimethylsiloxane layers with geometrical pattern, for use as a construction element in the microactuators. These microactuators could obtain multiple bending motions from a single fabrication process depending on the morphological pattern defined in the final step. Instead of fabricating via conventional photolithography route, which involves multiple steps with different chromium photomasks, this new method uses only one single design template to produce geometrically patterned layers, which are then specifically cut to obtain multiple device designs. The desired design of the actuator is decided in the final step of fabrication. The resulting microactuators generate motions such as a spiral, screw, and tube, using a single design template.
Micro/Nano Patterning on Polymers Using Soft Lithography Technique
