Micro/Nanolithography - A Heuristic Aspect on the Enduring Technology
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6

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Published By Intech

9781789230307, 9781789230314

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Fabrication and Replication of Periodic Nanopyramid Structures by Laser Interference Lithography and UV Nanoimprint Lithography for Solar Cells Applications

Micro/Nanolithography - A Heuristic Aspect on the Enduring Technology ◽

10.5772/intechopen.72534 ◽

2018 ◽

Author(s):

Amalraj Peter Amalathas ◽

Maan M. Alkaisi

Keyword(s):

Solar Cells ◽

Nanoimprint Lithography ◽

Interference Lithography ◽

Laser Interference Lithography ◽

Laser Interference

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Micro/Nano Patterning on Polymers Using Soft Lithography Technique

Micro/Nanolithography - A Heuristic Aspect on the Enduring Technology ◽

10.5772/intechopen.72885 ◽

2018 ◽

Author(s):

Sujatha Lakshminarayanan

Keyword(s):

Soft Lithography ◽

Nano Patterning ◽

Lithography Technique

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Large-Area Nanoimprint Lithography and Applications

Micro/Nanolithography - A Heuristic Aspect on the Enduring Technology ◽

10.5772/intechopen.72860 ◽

2018 ◽

Author(s):

Hongbo Lan

Keyword(s):

Nanoimprint Lithography ◽

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Optical Proximity Correction (OPC) Under Immersion Lithography

Micro/Nanolithography - A Heuristic Aspect on the Enduring Technology ◽

10.5772/intechopen.72699 ◽

2018 ◽

Author(s):

Ahmed Awad ◽

Atsushi Takahashi ◽

Chikaaki Kodaman

Keyword(s):

Optical Proximity Correction ◽

Immersion Lithography

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EUV/Soft X-Ray Interference Lithography

Micro/Nanolithography - A Heuristic Aspect on the Enduring Technology ◽

10.5772/intechopen.74564 ◽

2018 ◽

Author(s):

Shumin Yang ◽

Yanqing Wu

Keyword(s):

Interference Lithography ◽

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Introductory Chapter: The Eminence of Lithography—New Horizons of Next-Generation Lithography

Micro/Nanolithography - A Heuristic Aspect on the Enduring Technology ◽

10.5772/intechopen.70725 ◽

2018 ◽

Author(s):

Jagannathan Thirumalai

Keyword(s):

Next Generation ◽

New Horizons ◽

Next Generation Lithography

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