Microfabrication of fine electron beam tunnels using UV-LIGA and embedded polymer monofilaments for vacuum electron devices
2011 ◽
Vol 22
(1)
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pp. 015010
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2016 ◽
Vol 63
(12)
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pp. 4948-4954
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2011 ◽
Vol 23
(8)
◽
pp. 1989-1995
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