An All Solid-State Pulsed Power Generator for Plasma Immersion Ion Implantation (PIII)
2009 ◽
Vol 11
(2)
◽
pp. 220-224
◽
Keyword(s):
2017 ◽
Vol 45
(2)
◽
pp. 247-251
◽
Keyword(s):
Keyword(s):
2007 ◽
Vol 35
(3)
◽
pp. 614-618
◽
2001 ◽
Vol 72
(12)
◽
pp. 4464-4468
◽
2001 ◽
Vol 121
(4)
◽
pp. 351-358
◽