Variable angle spectroscopic ellipsometric characterization of HfO2thin film
2018 ◽
Vol 310
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pp. 012132
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2001 ◽
Vol 16
(9)
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pp. 806-811
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1990 ◽
Vol 5
(2)
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pp. 285-289
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Keyword(s):
2006 ◽
Vol 18
(15)
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pp. 3535-3542
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