Paraxial Ray Tracing Through Noncoaxial Astigmatic Optical Systems, and a 5 x 5 Augmented System Matrix

1994 ◽  
Vol 71 (4) ◽  
pp. 282-285 ◽  
Author(s):  
W F HARRIS

Electron-optical systems with curved axes—such as mass spectrographs and certain beta-ray spectrometers—have long been in practical use, but there has been available no complete theory of the aberrations of such systems. It is the object of the present paper to construct such a theory and to demonstrate, by an example, its application to practical problems. An appropriate co-ordinate system is set up by means of a ray-axis together with its normal and binormal. The electric and magnetic fields are then investigated with the help of tensor calculus; the variational principle of electron optics is also put into tensor form. The integrand of the variational equation may be separated into a series of polynomials, one of which determines the paraxial imaging properties of the system and the rest of which determine the aberrations. The condition is established for which, upon an appropriate transformation, either of the paraxial ray equations contains only one off-axis co-ordinate. Subsequent investigations are restricted to systems, which are termed ‘orthogonal’, for which this condition is satisfied. It is shown that, in a certain sense, no orthogonal electron-optical system can be wholly divergent. The second-order aberration and the zero-order and paraxial chromatic aberrations are then investigated by the method of perturbation characteristic functions. All formulae are given in their relativistic forms but their non-relativistic forms are indicated; formulae are therefore given for the calculation of the zero-order and paraxial relativistic correction. It is indicated to what extent one forfeits control over the second-order aberration—and hence over the paraxial chromatic aberration also—by specifying that the paraxial behaviour of rays should be Gaussian. As an example, the imaging properties of a helical beam moving in the field of a pair of coaxial cylindrical electrodes are calculated. There is also an appendix which gives formulae for the effect upon aberrations of a change in the aperture position.


Geophysics ◽  
2006 ◽  
Vol 71 (2) ◽  
pp. W1-W14 ◽  
Author(s):  
Einar Iversen

Inspired by recent ray-theoretical developments, the theory of normal-incidence rays is generalized to accommodate P- and S-waves in layered isotropic and anisotropic media. The calculation of the three main factors contributing to the two-way amplitude — i.e., geometric spreading, phase shift from caustics, and accumulated reflection/transmission coefficients — is formulated as a recursive process in the upward direction of the normal-incidence rays. This step-by-step approach makes it possible to implement zero-offset amplitude modeling as an efficient one-way wavefront construction process. For the purpose of upward dynamic ray tracing, the one-way eigensolution matrix is introduced, having as minors the paraxial ray-tracing matrices for the wavefronts of two hypothetical waves, referred to by Hubral as the normal-incidence point (NIP) wave and the normal wave. Dynamic ray tracing expressed in terms of the one-way eigensolution matrix has two advantages: The formulas for geometric spreading, phase shift from caustics, and Fresnel zone matrix become particularly simple, and the amplitude and Fresnel zone matrix can be calculated without explicit knowledge of the interface curvatures at the point of normal-incidence reflection.


2019 ◽  
Vol 215 ◽  
pp. 01001
Author(s):  
Raoul Kirner ◽  
Wilfried Noell ◽  
Toralf Scharf ◽  
Reinhard Voelkel

The application of laser light sources for illumination tasks like in mask aligner lithography relies on non-imaging optical systems with multi-aperture elements for beam shaping. When simulating such systems, the traditional approach is to separate the beam-shaping part (incoherent simulation) from dealing with coherence properties of the illuminating laser light source (diffraction theory with statistical treatment). We present an approach using Gaussian beam decomposition to include coherence simulation into ray tracing, combining these two parts, to get a complete picture in one simulation. We discuss source definition for such simulations, and verify our assumptions on a well-known system. We then apply our approach to an imaging beam shaping setup with microoptical multi-aperture elements. We compare the simulation to measurements of a similar beam-shaping setup with a 193 nm continuous-wave laser in a mask-aligner configuration.


2001 ◽  
Author(s):  
Sanna M. Aikio ◽  
Chen Liang ◽  
Jukka-Tapani Maekinen ◽  
Juha T. Rantala ◽  
Michael R. Descour
Keyword(s):  

1988 ◽  
Vol 27 (8) ◽  
pp. 1574 ◽  
Author(s):  
You-Wen Zhang ◽  
Mo-Jun Chang ◽  
Cu-Wu Yang ◽  
Hai-Cheng Tu

Author(s):  
Ralf Bathel ◽  
Stefan Sinzinger ◽  
Jürgen Jahns
Keyword(s):  

Sign in / Sign up

Export Citation Format

Share Document