EPR study of carbon and silicon related defects in carbon-rich hydrogenated amorphous silicon-carbon films

2010 ◽  
Vol 81 (15) ◽  
Author(s):  
E. N. Kalabukhova ◽  
S. N. Lukin ◽  
D. V. Savchenko ◽  
B. D. Shanina ◽  
A. V. Vasin ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Carbon Films ◽  
Silicon Carbon ◽  
Hydrogenated Amorphous

Characterization of hydrogenated amorphous silicon-carbon films deposited by hybrid-plasma CVD

1994 ◽  
Vol 34 (1-4) ◽  
pp. 409-414 ◽  
Author(s):  
Tadashi Fujii ◽  
Kenji Sameshima ◽  
Hiroshi Okada ◽  
Kenji Yoshida ◽  
Tadao Hashimoto ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Carbon Films ◽  
Plasma Cvd ◽  
Silicon Carbon ◽  
Hybrid Plasma ◽  
Hydrogenated Amorphous

Crystallization of hydrogenated amorphous silicon–carbon films by means of laser treatments

2005 ◽  
Vol 247 (1-4) ◽  
pp. 471-476 ◽  
Author(s):  
G. Ambrosone ◽  
U. Coscia ◽  
S. Lettieri ◽  
P. Maddalena ◽  
C. Minarini ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Carbon Films ◽  
Silicon Carbon ◽  
Laser Treatments ◽  
Hydrogenated Amorphous

scholarly journals Low residual stress in hydrogenated amorphous silicon-carbon films deposited by low-temperature PECVD

2019 ◽  
Vol 8 (6) ◽  
pp. 5581-5590 ◽  
Author(s):  
José Herrera-Celis ◽  
Claudia Reyes-Betanzo ◽  
Oscar Gelvez-Lizarazo ◽  
L.G. Arriaga ◽  
Adrián Itzmoyotl-Toxqui
Keyword(s):  
Residual Stress ◽  
Low Temperature ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Carbon Films ◽  
Silicon Carbon ◽  
Hydrogenated Amorphous
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