Ultra precision motion control of a multiple degrees of freedom magnetic suspension stage

2002 ◽  
Vol 7 (1) ◽  
pp. 67-78 ◽  
Author(s):  
Ximin Shan ◽  
Shih-Kang Kuo ◽  
Jihua Zhang ◽  
Chia-Hsiang Menq
Keyword(s):  
Motion Control ◽  
Degrees Of Freedom ◽  
Magnetic Suspension ◽  
Precision Motion Control ◽  
Multiple Degrees Of Freedom ◽  
Ultra Precision ◽  
Precision Motion

scholarly journals Iterative tuning notch filter for suppressing resonance in ultra-precision motion control

2016 ◽  
Vol 8 (11) ◽  
pp. 168781401667409 ◽  
Author(s):  
Wei Teng ◽  
Xiaolong Zhang ◽  
Yangyang Zhang ◽  
Liangliang Yang
Keyword(s):  
Motion Control ◽  
Notch Filter ◽  
Precision Motion Control ◽  
Ultra Precision ◽  
Precision Motion
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