Nonlinear control of electrostatically shaped membrane with state and control constraints
1995 ◽
Vol 28
(14)
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pp. 445-450
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1995 ◽
Vol 5
(5)
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pp. 487-504
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Keyword(s):
Keyword(s):
2008 ◽
Vol 22
(2)
◽
pp. 161-179
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2020 ◽
Vol 65
(10)
◽
pp. 4288-4294