Intra-cavity extreme ultraviolet light source based on a mode locked Ti:Sapphire oscillator with 9.4 MHz repetition rate

2013 Conference on Lasers & Electro-Optics Europe & International Quantum Electronics Conference CLEO EUROPE/IQEC ◽

10.1109/cleoe-iqec.2013.6801073 ◽

2013 ◽

Author(s):

E. Seres ◽

J. Seres ◽

Ch. Spielmann

Keyword(s):

Light Source ◽

Ultraviolet Light ◽

Repetition Rate ◽

Extreme Ultraviolet ◽

Extreme Ultraviolet Light

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Extreme ultraviolet light source based on intracavity high harmonic generation in a mode locked Ti:sapphire oscillator with 94 MHz repetition rate

Optics Express ◽

10.1364/oe.20.006185 ◽

2012 ◽

Vol 20 (6) ◽

pp. 6185 ◽

Author(s):

Enikoe Seres ◽

Jozsef Seres ◽

Christian Spielmann

Keyword(s):

Light Source ◽

Ultraviolet Light ◽

Harmonic Generation ◽

Repetition Rate ◽

Extreme Ultraviolet ◽

High Harmonic ◽

High Harmonic Generation ◽

Extreme Ultraviolet Light

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High Repetition Rate Pulsed Power Generator for Extreme Ultraviolet Light Source

2007 IEEE 34th International Conference on Plasma Science (ICOPS) ◽

10.1109/ppps.2007.4345795 ◽

2007 ◽

Author(s):

T. Sakugawa ◽

K. Nagano ◽

Y. Kondo ◽

S. Katsuki ◽

T. Namihira ◽

...

Keyword(s):

Light Source ◽

Ultraviolet Light ◽

Repetition Rate ◽

Extreme Ultraviolet ◽

High Repetition Rate ◽

Pulsed Power ◽

Power Generator ◽

High Repetition ◽

Pulsed Power Generator ◽

Extreme Ultraviolet Light

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Extreme ultraviolet light source at a megahertz repetition rate based on high-harmonic generation inside a mode-locked thin-disk laser oscillator

Optics Letters ◽

10.1364/ol.42.005170 ◽

2017 ◽

Vol 42 (24) ◽

pp. 5170 ◽

Author(s):

F. Labaye ◽

M. Gaponenko ◽

V. J. Wittwer ◽

A. Diebold ◽

C. Paradis ◽

...

Keyword(s):

Light Source ◽

Ultraviolet Light ◽

Harmonic Generation ◽

Repetition Rate ◽

Extreme Ultraviolet ◽

High Harmonic ◽

Thin Disk ◽

Laser Oscillator ◽

Thin Disk Laser ◽

Extreme Ultraviolet Light

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High repetition rate pulsed power generator for extreme ultraviolet light source

2007 IEEE Pulsed Power Plasma Science Conference ◽

10.1109/ppps.2007.4651937 ◽

2007 ◽

Author(s):

T. Sakugawa ◽

K. Nagano ◽

Y. Kondo ◽

T. Namihira ◽

S. Katsuki ◽

...

Keyword(s):

Light Source ◽

Ultraviolet Light ◽

Repetition Rate ◽

Extreme Ultraviolet ◽

High Repetition Rate ◽

Pulsed Power ◽

Power Generator ◽

High Repetition ◽

Pulsed Power Generator ◽

Extreme Ultraviolet Light

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Radiative Properties and Hydrodynamics of Laser Produced Tin Plasma for Efficient Extreme Ultraviolet Light Source

Springer Proceedings in Physics - X-Ray Lasers 2006 ◽

10.1007/978-1-4020-6018-2_77 ◽

2008 ◽

pp. 607-618

Author(s):

S. Fujioka ◽

H. Nishimura ◽

K. Nishihara ◽

Y. Tao ◽

T. Aota ◽

...

Keyword(s):

Light Source ◽

Ultraviolet Light ◽

Extreme Ultraviolet ◽

Radiative Properties ◽

Extreme Ultraviolet Light

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Optical observation of gas jet z-pinch discharge produced extreme ultraviolet light source

2007 IEEE Pulsed Power Plasma Science Conference ◽

10.1109/ppps.2007.4652513 ◽

2007 ◽

Author(s):

M. Watanabe ◽

N. Kishi ◽

N. Iizuka ◽

T. Orishimo ◽

J. Fei ◽

...

Keyword(s):

Light Source ◽

Ultraviolet Light ◽

Extreme Ultraviolet ◽

Optical Observation ◽

Gas Jet ◽

Extreme Ultraviolet Light ◽

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High-radiance extreme-ultraviolet light source for actinic inspection and metrology

Journal of Micro/Nanolithography MEMS and MOEMS ◽

10.1117/1.jmm.11.2.021107 ◽

2012 ◽

Vol 11 (2) ◽

pp. 021107-1 ◽

Author(s):

Peter Choi ◽

Sergey V. Zakharov ◽

Raul Aliaga-Rossel ◽

Aldrice Bakouboula ◽

Otman Benali ◽

...

Keyword(s):

Light Source ◽

Ultraviolet Light ◽

Extreme Ultraviolet ◽

Extreme Ultraviolet Light

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Influence of the electrode wear on the EUV generation of a discharge based extreme ultraviolet light source

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/aa7c9f ◽

2017 ◽

Vol 50 (34) ◽

pp. 345601 ◽

Author(s):

Jochen Vieker ◽

Klaus Bergmann

Keyword(s):

Light Source ◽

Ultraviolet Light ◽

Extreme Ultraviolet ◽

Electrode Wear ◽

Extreme Ultraviolet Light

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Extreme Ultraviolet Light Source by High-Harmonic Generation Inside an Ultrafast Thin-Disk Laser

Advanced Photonics 2018 (BGPP, IPR, NP, NOMA, Sensors, Networks, SPPCom, SOF) ◽

10.1364/np.2018.npth1c.8 ◽

2018 ◽

Author(s):

F. Labaye ◽

M. Gaponenko ◽

V. J. Wittwer ◽

A. Diebold ◽

C. Paradis ◽

...

Keyword(s):

Light Source ◽

Ultraviolet Light ◽

Harmonic Generation ◽

Extreme Ultraviolet ◽

High Harmonic ◽

High Harmonic Generation ◽

Thin Disk ◽

Thin Disk Laser ◽

Extreme Ultraviolet Light

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Low density targets for laser-produced-plasma (LPP) extreme ultraviolet light source with high-CE and toward high-repletion supply

10.1117/12.773275 ◽

2008 ◽

Author(s):

Keiji Nagai ◽

Liqin Ge ◽

Pejun Cai ◽

Cao Pan ◽

ZhongZe Gu ◽

...

Keyword(s):

Light Source ◽

Ultraviolet Light ◽

Extreme Ultraviolet ◽

Low Density ◽

Laser Produced Plasma ◽

Extreme Ultraviolet Light

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