Electron quantum path control in high harmonic generation via chirp variation of strong laser pulses

The quantum phases of the electron paths driven by an ultrafast laser in high harmonic generation in an atomic gas depends linearly on the instantaneous cycle-averaged laser intensity. Using high laser intensities, a complete single ionisation of the atomic gas may occur before the laser pulse peak. Therefore, high harmonic generation could be localised only in a temporal window at the leading edge of laser pulse envelope. Varying the laser frequency chirp of an intense ultrafast laser pulse, the centre, and the width of the temporal window, that the high harmonic generation phenomenon occurs, could be controlled with high accuracy. This way, both the duration and the phase of the electron trajectories, that generate efficiently high harmonics, is fully controlled. A method of spectral control and selection of the high harmonic extreme ultraviolet light from distinct quantum paths is experimentally demonstrated. Furthermore, a phenomenological numerical model enlightens the physical processes that take place. This novel approach of the electron quantum path selection via laser chirp is a simple and versatile way of controlling the time-spectral characteristics of the coherent extreme ultraviolet light with applications in the fields of attosecond pulses and soft x-ray nano-imaging.

Enhancing the conversion efficiency of extreme ultraviolet light sources using a 2 µm-wavelength laser

In this study, we use the FLASH radiation hydrodynamic code and the FLYCHK atomic code to investigate the energy conversion and spectra associated with laser–Sn target interactions with 1 µm and 2 µm wavelength lasers. We found that the conversion efficiency (CE) reached as much as 3.38% with the 2 µm laser, which is 1.48 percentage points higher than the 1 µm laser (CE = 1.9%). In addition, we analyzed the contribution of dominant ionization states to the emission spectrum for both lasers. We observed that the growths of the out-of-band emission eventually led to a broadening of the spectrum, resulting in a reduction of SP for the 1 µm laser. By contrast, the emission main peaks were all centered near 13.5nm for the 2 µm laser, which is beneficial for efficient emission of light with a 13.5 nm wavelength (relevant for nanolithographic applications).

Multilayer Reflective Coatings for BEUV Lithography: A Review

The development of microelectronics is always driven by reducing transistor size and increasing integration, from the initial micron-scale to the current few nanometers. The photolithography technique for manufacturing the transistor needs to reduce the wavelength of the optical wave, from ultraviolet, deep, to the existing extreme ultraviolet light. One approach toward decreasing the working wavelength is using lithography based on beyond extreme ultraviolet radiation (BEUV) with a wavelength around 7 nm. The BEUV lithography relies on advanced reflective optics such as periodic multilayer film X-ray mirrors (PMMs). PMMs are artificial Bragg crystals having alternate layers of “light” and “heavy” materials. The periodicity of such a structure is relatively half of the working wavelength. Since a BEUV lithographical system contains at least 10 mirrors, optics’ reflectivity becomes a crucial point. The increasing of a single mirror's reflectivity by 10% will increase the system’s overall throughput by 6 times. In this work, the properties and development status of PMMs, particularly for BEUV lithography, were reviewed to gain a better understanding of their advantages and limitations. Emphasis was given to materials, design concepts, structure, deposition method, and optical characteristics of these coatings.

Electron quantum path control in high harmonic generation via chirp variation of strong laser pulses

The quantum phases of the electron paths driven by an ultrafast laser in high harmonic generation in an atomic gas depends linearly on the instantaneous cycle-averaged laser intensity. Using high laser intensities, a complete single ionisation of the atomic gas may occur before the laser pulse peak. Therefore, high harmonic generation could be localized only in a temporal window at the leading edge of laser pulse envelope. Varying the laser frequency chirp of an intense ultrafast laser pulse, the centre, and the width of the temporal window, that the high harmonic generation phenomenon occurs, could be controlled with high accuracy. This way, both the duration and the phase of the electron trajectories, that generate efficiently high harmonics, is fully controlled. An accurate and robust method of spectral control and selection of the high harmonic extreme ultraviolet light from distinct quantum paths is experimentally demonstrated. Furthermore, a phenomenological numerical model enlightens the physical processes that take place. This novel approach of the electron quantum path selection via laser chirp is a simple and versatile way of controlling the time-spectral characteristics of the coherent extreme ultraviolet light with future applications in the fields of attosecond pulses and soft x-ray nano-imaging.