Low density targets for laser-produced-plasma (LPP) extreme ultraviolet light source with high-CE and toward high-repletion supply

2008 ◽  
Author(s):  
Keiji Nagai ◽  
Liqin Ge ◽  
Pejun Cai ◽  
Cao Pan ◽  
ZhongZe Gu ◽  
...  
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Low Density ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Light

scholarly journals Development of Extreme-Ultraviolet Light Source by Laser-Produced Plasma

2008 ◽  
Vol 36 (APLS) ◽  
pp. 1125-1128 ◽  
Author(s):  
Hiroaki NISHIMURA ◽  
Shinsuke FUJIOKA ◽  
Masashi SHIMOMURA ◽  
Hirokazu SAKAGUCHI ◽  
Yuki NAKAI ◽  
...  
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Light

Behavior of debris from laser-produced plasma for extreme ultraviolet light source measured by laser imaging technique

2006 ◽  
Vol 89 (18) ◽  
pp. 181109 ◽  
Author(s):  
Hiroki Tanaka ◽  
Yuki Hashimoto ◽  
Kouji Tamaru ◽  
Akihiko Takahashi ◽  
Tatsuo Okada
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Imaging Technique ◽  
Laser Imaging ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Light

scholarly journals EUV (Extreme Ultraviolet) Light Source by Laser Produced Plasma Using Tin Through-hole Targets

2009 ◽  
Vol 75 (8) ◽  
pp. 967-972
Author(s):  
Motohiro NAKANO ◽  
Yasuyuki SANDA ◽  
Haruyuki INOUE ◽  
Yasushi OSHIKANE ◽  
Toshihiko KATAOKA
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Light ◽  
Through Hole

scholarly journals Optimum laser-produced plasma for extreme ultraviolet light source

2008 ◽  
Vol 112 (4) ◽  
pp. 042049 ◽  
Author(s):  
S Fujioka ◽  
H Nishimura ◽  
M Shimomura ◽  
H Sakaguchi ◽  
Y Nakai ◽  
...  
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Light

High-radiance extreme-ultraviolet light source for actinic inspection and metrology

2012 ◽  
Vol 11 (2) ◽  
pp. 021107-1 ◽  
Author(s):  
Peter Choi ◽  
Sergey V. Zakharov ◽  
Raul Aliaga-Rossel ◽  
Aldrice Bakouboula ◽  
Otman Benali ◽  
...  
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Light
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