Deposition of tantalum nitride films as the absorption load resistor for microwave power standard chips
1987 ◽
Vol IM-36
(2)
◽
pp. 443-449
◽
2009 ◽
Vol 58
(4)
◽
pp. 1114-1119
◽
2011 ◽
Vol 60
(7)
◽
pp. 2696-2701
◽
2013 ◽
Vol 333-335
◽
pp. 284-289
2019 ◽
Vol 68
(2)
◽
pp. 558-565
◽
Keyword(s):
1965 ◽
Vol IM-14
(1 and 2)
◽
pp. 59-63
◽