Fabrication of hybrid micro- and nanostructures with a strong nonlinear response is challenging and represents a great interest due to a wide range of photonic applications. Usually, such structures are produced by quite complicated and time-consuming techniques. This work demonstrates laser-induced hybrid metal-dielectric structures with strong nonlinear properties obtained by a single-step fabrication process. We determine the influence of several incident femtosecond pulses on the Au/Si bi-layer film on produced structure morphology. The created hybrid systems represent isolated nanoparticles with a height of 250–500 nm exceeding the total thickness of the Au-Si bi-layer. It is shown that fabricated hybrid nanostructures demonstrate enhancement of the SHG signal (up to two orders of magnitude) compared to the initial planar sample and a broadband photoluminescence signal (more than 200 nm in width) in the visible spectral region. We establish the correlation between nonlinear signal and phase composition provided by Raman scattering measurements. Such laser-induced structures have significant potential in optical sensing applications and can be used as components for different nanophotonic devices.
Femtosecond Laser Fabrication of Hybrid Metal-Dielectric Structures with Nonlinear Photoluminescence
