Suppression of spurious modes via dummy electrodes and 2% frequency shift via cavity size selection for 1 GHz AlN MEMS contour-mode resonators

Author(s):  
Serkan Yazici ◽  
Marco Giovannini ◽  
Nai-Kuei Kuo ◽  
Gianluca Piazza
protocols.io ◽  
2021 ◽  
Author(s):  
Ashley Jones ◽  
Neeraj Purushotham ◽  
Jamila Nasim ◽  
Benjamin Schwessinger

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