Coulomb interaction effect correction in e-beam block exposure lithography
1989 ◽
Vol 82
(1)
◽
pp. 118-124
◽
Keyword(s):
1999 ◽
Vol 38
(Part 1, No. 12B)
◽
pp. 7217-7221
◽
1995 ◽
Vol 34
(Part 1, No. 12B)
◽
pp. 6684-6688
◽
2010 ◽
Vol 23
(7)
◽
pp. 1301-1305
2001 ◽
Vol 19
(6)
◽
pp. 2572
◽
Keyword(s):
1995 ◽
Vol 34
(12S)
◽
pp. 6684
◽