HNU-EBL: A Software Toolkit for Electron Beam Lithography Simulation and Optimization

2021 ◽  
Author(s):  
Wei Liu ◽  
Wenze Yao ◽  
Chengyang Hou ◽  
Hongcheng Xu ◽  
Haojie Zhao ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Simulation And Optimization ◽  
Software Toolkit ◽  
Lithography Simulation

Electron beam lithography simulation for sub-10 nm patterning

2014 ◽  
Vol 53 (6S) ◽  
pp. 06JB02 ◽  
Author(s):  
Katsushi Michishita ◽  
Masaaki Yasuda ◽  
Hiroaki Kawata ◽  
Yoshihiko Hirai
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Lithography Simulation

Electron beam lithography simulation based on a single convolution approach: application for sub-45nm nodes

2007 ◽  
Author(s):  
J. C. Le denmat ◽  
S. Manakli ◽  
B. Icard ◽  
C. Soonekindt ◽  
B. Minghetti ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Lithography Simulation ◽  
Simulation Based ◽  
Convolution Approach
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