proximity effect correction
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Proximity Effect Correction for Fresnel Holograms on Nanophotonic Phased Arrays

2021 ◽  
Author(s):  
Xuetong Sun ◽  
Yang Zhang ◽  
Po-Chun Huang ◽  
Niloy Acharjee ◽  
Mario Dagenais ◽  
...  
Keyword(s):  
Proximity Effect ◽  
Phased Arrays ◽  
Proximity Effect Correction

Fabrication of Si photonic waveguides by electron beam lithography using improved proximity effect correction

2020 ◽  
Vol 59 (12) ◽  
pp. 126502
Author(s):  
Moataz Eissa ◽  
Takuya Mitarai ◽  
Tomohiro Amemiya ◽  
Yasuyuki Miyamoto ◽  
Nobuhiko Nishiyama
Keyword(s):  
Electron Beam ◽  
Proximity Effect ◽  
Electron Beam Lithography ◽  
Photonic Waveguides ◽  
Proximity Effect Correction

Nanofabrication of 50 nm zone plates through e-beam lithography with local proximity effect correction for x-ray imaging

2020 ◽  
Vol 29 (4) ◽  
pp. 047501 ◽  
Author(s):  
Jingyuan Zhu ◽  
Sichao Zhang ◽  
Shanshan Xie ◽  
Chen Xu ◽  
Lijuan Zhang ◽  
...  
Keyword(s):  
Proximity Effect ◽  
X Ray ◽  
Zone Plates ◽  
X Ray Imaging ◽  
Proximity Effect Correction ◽  
Local Proximity

scholarly journals Dose regularization via filtering and projection: An open-source code for optimization-based proximity-effect-correction for nanoscale lithography

2018 ◽  
Vol 199 ◽  
pp. 52-57 ◽  
Author(s):  
Emil H. Eriksen ◽  
Adnan Nazir ◽  
Peter Balling ◽  
Joakim Vester-Petersen ◽  
Rasmus E. Christiansen ◽  
...  
Keyword(s):  
Open Source ◽  
Proximity Effect ◽  
Source Code ◽  
Open Source Code ◽  
Proximity Effect Correction
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