proximity effect correction
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Investigation on helium ion beam lithography with proximity effect correction

2021 ◽  
Vol 20 (03) ◽  
Author(s):  
Chien-Lin Lee ◽  
Sheng-Wei Chien ◽  
Kuen-Yu Tsai ◽  
Chun-Hung Liu
Keyword(s):  
Proximity Effect ◽  
Ion Beam ◽  
Ion Beam Lithography ◽  
Helium Ion ◽  
Proximity Effect Correction

Proximity Effect Correction for Fresnel Holograms on Nanophotonic Phased Arrays

2021 ◽  
Author(s):  
Xuetong Sun ◽  
Yang Zhang ◽  
Po-Chun Huang ◽  
Niloy Acharjee ◽  
Mario Dagenais ◽  
...  
Keyword(s):  
Proximity Effect ◽  
Phased Arrays ◽  
Proximity Effect Correction

Fabrication of Si photonic waveguides by electron beam lithography using improved proximity effect correction

2020 ◽  
Vol 59 (12) ◽  
pp. 126502
Author(s):  
Moataz Eissa ◽  
Takuya Mitarai ◽  
Tomohiro Amemiya ◽  
Yasuyuki Miyamoto ◽  
Nobuhiko Nishiyama
Keyword(s):  
Electron Beam ◽  
Proximity Effect ◽  
Electron Beam Lithography ◽  
Photonic Waveguides ◽  
Proximity Effect Correction

Shape and dose control for proximity effect correction on massively parallel electron-beam systems

2020 ◽  
Vol 38 (6) ◽  
pp. 062603
Author(s):  
Md Nabid Hasan ◽  
Soo-Young Lee ◽  
Byung-Sup Ahn ◽  
Jin Choi ◽  
Joon-Soo Park
Keyword(s):  
Electron Beam ◽  
Proximity Effect ◽  
Massively Parallel ◽  
Dose Control ◽  
Proximity Effect Correction

Nanofabrication of 50 nm zone plates through e-beam lithography with local proximity effect correction for x-ray imaging

2020 ◽  
Vol 29 (4) ◽  
pp. 047501 ◽  
Author(s):  
Jingyuan Zhu ◽  
Sichao Zhang ◽  
Shanshan Xie ◽  
Chen Xu ◽  
Lijuan Zhang ◽  
...  
Keyword(s):  
Proximity Effect ◽  
X Ray ◽  
Zone Plates ◽  
X Ray Imaging ◽  
Proximity Effect Correction ◽  
Local Proximity

scholarly journals Dose regularization via filtering and projection: An open-source code for optimization-based proximity-effect-correction for nanoscale lithography

2018 ◽  
Vol 199 ◽  
pp. 52-57 ◽  
Author(s):  
Emil H. Eriksen ◽  
Adnan Nazir ◽  
Peter Balling ◽  
Joakim Vester-Petersen ◽  
Rasmus E. Christiansen ◽  
...  
Keyword(s):  
Open Source ◽  
Proximity Effect ◽  
Source Code ◽  
Open Source Code ◽  
Proximity Effect Correction

Model-based proximity effect correction for helium ion beam lithography

2018 ◽  
Author(s):  
Kuen-Yu Tsai ◽  
Chien-Lin Lee ◽  
Sheng-Wei Chien
Keyword(s):  
Proximity Effect ◽  
Ion Beam ◽  
Ion Beam Lithography ◽  
Model Based ◽  
Helium Ion ◽  
Proximity Effect Correction

scholarly journals Isofocal dose based proximity effect correction tolerance to the effective process blur

2017 ◽  
Vol 35 (6) ◽  
pp. 06G505 ◽  
Author(s):  
Gerald G. Lopez ◽  
Mohsen Azadi ◽  
Meredith G. Metzler ◽  
Nikola Belic ◽  
Ulrich Hofmann
Keyword(s):  
Proximity Effect ◽  
Proximity Effect Correction
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