Improvement of polarization lifetime by using wafer-level micro spherical rubidium vapor cells for chip-scale atomic magnetometers

2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2016.7421806 ◽

2016 ◽

Author(s):

Yu Ji ◽

Qi Gan ◽

Lei Wu ◽

Jintang Shang

Keyword(s):

Wafer Level ◽

Rubidium Vapor ◽

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Wafer-level filling of microfabricated atomic vapor cells based on thin-film deposition and photolysis of cesium azide

Applied Physics Letters ◽

10.1063/1.2712501 ◽

2007 ◽

Vol 90 (11) ◽

pp. 114106 ◽

Author(s):

Li-Anne Liew ◽

John Moreland ◽

Vladislav Gerginov

Keyword(s):

Thin Film ◽

Thin Film Deposition ◽

Film Deposition ◽

Atomic Vapor ◽

Wafer Level ◽

Vapor Cells ◽

Atomic Vapor Cells

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Wafer scale fabrication of highly integrated rubidium vapor cells

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2014.6765700 ◽

2014 ◽

Author(s):

T. Overstolz ◽

J. Haesler ◽

G. Bergonzi ◽

A. Pezous ◽

P.-A. Clerc ◽

...

Keyword(s):

Rubidium Vapor ◽

Wafer Scale ◽

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Low temperature, wafer-level process of alkali-metal vapor cells for micro-fabricated atomic clocks

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) ◽

10.1109/transducers.2017.7994079 ◽

2017 ◽

Author(s):

Yoshikazu Hirai ◽

Kenta Terashima ◽

Katsuo Nakamura ◽

Toshiyuki Tsuchiya ◽

Osamu Tabata

Keyword(s):

Low Temperature ◽

Alkali Metal ◽

Metal Vapor ◽

Atomic Clocks ◽

Wafer Level ◽

Alkali Metal Vapor ◽

Vapor Cells ◽

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Wafer-Level Micro Alkali Vapor Cells with Anti-Relaxation Coating Compatible with MEMS Packaging for Chip-Scale Atomic Magnetometers

2017 IEEE 67th Electronic Components and Technology Conference (ECTC) ◽

10.1109/ectc.2017.136 ◽

2017 ◽

Author(s):

Yu Ji ◽

Jintang Shang ◽

Qi Gan ◽

Lei Wu

Keyword(s):

Wafer Level ◽

Mems Packaging ◽

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Wafer-Level Hermetic All-Glass Packaging for Microalkali Vapor Cells of Chip-Scale Atomic Devices

IEEE Transactions on Components Packaging and Manufacturing Technology ◽

10.1109/tcpmt.2015.2462748 ◽

2015 ◽

Vol 5 (11) ◽

pp. 1551-1558 ◽

Author(s):

Yu Ji ◽

Qi Gan ◽

Lei Wu ◽

Jintang Shang ◽

Ching-Ping Wong

Keyword(s):

Wafer Level ◽

Vapor Cells ◽

Glass Packaging

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Spherical rubidium vapor cells fabricated by micro glass blowing

10.1109/memsys.2007.4433044 ◽

2007 ◽

Author(s):

E. Jesper Eklund ◽

Andrei M. Shkel ◽

Svenja Knappe ◽

Elizabeth Donley ◽

John Kitching

Keyword(s):

Rubidium Vapor ◽

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Study of the Phenomena Affecting the Composition of Rubidium Vapor Cells

10.1109/freq.1968.199733 ◽

1968 ◽

Author(s):

M.P.R. Thomsen ◽

L.J. Stief ◽

R.J. Fallon

Keyword(s):

Rubidium Vapor ◽

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Effects of water concentration in the coating solution on the wall relaxation rate of octadecyltrichlorosilane coated rubidium vapor cells

Journal of Applied Physics ◽

10.1063/1.4906851 ◽

2015 ◽

Vol 117 (4) ◽

pp. 043106 ◽

Author(s):

Guiying Zhang ◽

Lihua Wei ◽

Meiling Wang ◽

Kaifeng Zhao

Keyword(s):

Relaxation Rate ◽

Water Concentration ◽

Rubidium Vapor ◽

Coating Solution ◽

Vapor Cells ◽

Wall Relaxation

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Comprehensive study of different factors on anti-relaxation properties of octadecyltrichlorosilane coated rubidium vapor cells

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/ac2f13 ◽

2021 ◽

Author(s):

Haotian Chi ◽

Heng Yuan ◽

Zhongyu Cai ◽

Xuelei Wang ◽

Huining Shang ◽

...

Keyword(s):

Rubidium Vapor ◽

Relaxation Properties ◽

Vapor Cells ◽

Comprehensive Study

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Fabrication of wafer-level spherical Rb vapor cells for miniaturized atomic clocks by a chemical foaming process

2012 13th International Conference on Electronic Packaging Technology & High Density Packaging ◽

10.1109/icept-hdp.2012.6474922 ◽

2012 ◽

Author(s):

Wenlong Wei ◽

Jintang Shang ◽

Wenlin Kuai ◽

Shunjin Qin ◽

Tingting Wang ◽

...

Keyword(s):

Atomic Clocks ◽

Wafer Level ◽

Foaming Process ◽

Rb Vapor ◽

Vapor Cells ◽

Chemical Foaming

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