Design and simulation of corrugated diaphragm applied to the MEMS fiber optic pressure sensor

Author(s):  
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Yangxi Zhang ◽  
Guandong Liu ◽  
Yilong Hao ◽  
Chengchen Gao
2005 ◽  
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pp. 447-449 ◽  
Author(s):  
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Anbo Wang
Keyword(s):  

1997 ◽  
Vol 101 (5) ◽  
pp. 3033-3033 ◽  
Author(s):  
Gregory Clement ◽  
Ruiming Liu ◽  
Stephen Letcher ◽  
Peter Stepanishen

1998 ◽  
Author(s):  
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Jianzhong Hao ◽  
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2011 ◽  
Vol 48 (12) ◽  
pp. 120606
Author(s):  
倪敏 Ni Min ◽  
冉曾令 Ran Zengling ◽  
鲁恩 Lu En ◽  
饶云江 Rao Yunjiang
Keyword(s):  

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