Domain decomposition method for electromagnetic scattering problems: application to EUV lithography
2008 ◽
Vol 22
(2-3)
◽
pp. 251-266
◽
1999 ◽
Vol 13
(11)
◽
pp. 1553-1568
◽
2010 ◽
Vol 53
(2)
◽
pp. 357-361
◽
2017 ◽
Vol 85
◽
pp. 99-104
◽
2006 ◽
Vol 49
(2)
◽
pp. 265-274
◽