Two methods for fabricating hollow micro needle arrays have been described. One method is that fabricating hollow micro needle array based on double X-ray exposures-----one exposure is normal X-ray exposure with X-ray mask and the other is X-ray exposure without X-ray mask. The other method is based on moving mask X-ray exposures plus an alignment X-ray exposure. The feasibilities for the hollow micro needle arrays were demonstrated by fabricating 25 micro needles in a 5x5 mm2 polymer chip.
Hollow Microneedle Arrays Produced by Low‐Cost, High‐Fidelity Replication of Hypodermic Needle Tips for High‐Dose Transdermal Drug Delivery