uv lithography
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protocols.io ◽  
2021 ◽  
Author(s):  
Serhat Sevli ◽  
not provided C. Yunus Sahan

Author(s):  
Alban Gassenq ◽  
Kevin Chevrier ◽  
Antoine Bard ◽  
Jean-Michel Benoit ◽  
Clementine Symonds ◽  
...  
Keyword(s):  

AIP Advances ◽  
2021 ◽  
Vol 11 (4) ◽  
pp. 045008
Author(s):  
Zhimin Zhang ◽  
Qingwang Meng ◽  
Ningning Luo
Keyword(s):  

2021 ◽  
Vol 3 (8) ◽  
pp. 2236-2244
Author(s):  
Matthias Keil ◽  
Alexandre Emmanuel Wetzel ◽  
Kaiyu Wu ◽  
Elena Khomtchenko ◽  
Jitka Urbankova ◽  
...  

A novel super resolution deep UV lithography method is employed to fabricate large area plasmonic metasurfaces.


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