4H-sic electrostatic cantilever actuator released by photoelectrochemical etching and application for frequency mixing
1994 ◽
Vol 141
(4)
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pp. 958-967
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1974 ◽
Vol 22
(12)
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pp. 1100-1103
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2010 ◽
Vol 96
(5)
◽
pp. 977-980
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1963 ◽
Vol 14
(6)
◽
pp. 386-390
◽
2005 ◽
Vol 247
(1-3)
◽
pp. 205-212
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