4H-sic electrostatic cantilever actuator released by photoelectrochemical etching and application for frequency mixing

Author(s):  
F. Zhao ◽  
A. Lim ◽  
Q. Tran ◽  
C.F. Huang
2010 ◽  
Vol 96 (5) ◽  
pp. 977-980 ◽  
Author(s):  
E. Douka ◽  
K. A. Zacharias ◽  
L. J. Hadjileontiadis ◽  
A. Trochidis

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