Optimal scheduling of time-constrained single-arm cluster tools with wafer revisiting

2016 13th International Workshop on Discrete Event Systems (WODES) ◽

10.1109/wodes.2016.7497872 ◽

2016 ◽

Author(s):

ZiCheng Liu ◽

NaiQi Wu ◽

FaJun Yang ◽

Yan Qiao

Keyword(s):

Optimal Scheduling ◽

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A Closed-Form Solution for Schedulability and Optimal Scheduling of Dual-Arm Cluster Tools With Wafer Residency Time Constraint Based on Steady Schedule Analysis

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2008.2008633 ◽

2010 ◽

Vol 7 (2) ◽

pp. 303-315 ◽

Author(s):

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Closed Form ◽

Closed Form Solution ◽

Form Solution ◽

Time Constraint ◽

Optimal Scheduling ◽

Cluster Tools ◽

Dual Arm ◽

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Optimal Scheduling of Complex Multi-Cluster Tools Based on Timed Resource-Oriented Petri Nets

IEEE Access ◽

10.1109/access.2016.2549546 ◽

2016 ◽

Vol 4 ◽

pp. 2096-2109 ◽

Author(s):

Qinghua Zhu ◽

Naiqi Wu ◽

Yan Qiao ◽

Mengchu Zhou

Keyword(s):

Optimal Scheduling ◽

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Optimal scheduling analysis of treelike hybrid multi-cluster tools

2016 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2016.7743573 ◽

2016 ◽

Author(s):

FaJun Yang ◽

NaiQi Wu ◽

Yan Qiao ◽

MengChu Zhou

Keyword(s):

Optimal Scheduling ◽

Scheduling Analysis ◽

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Optimal scheduling of transient cycles for single-armed cluster tools

2013 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2013.6653939 ◽

2013 ◽

Author(s):

Dae-Kyu Kim ◽

Tae-Eog Lee ◽

Hyun-Jung Kim

Keyword(s):

Optimal Scheduling ◽

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An optimal scheduling technique for dual-arm robots in cluster tools with residency constraints

Proceedings of the 39th IEEE Conference on Decision and Control (Cat. No.00CH37187) ◽

10.1109/cdc.2000.912239 ◽

2002 ◽

Author(s):

S. Rostami ◽

B. Hamidzadeh ◽

D. Camporese

Keyword(s):

Optimal Scheduling ◽

Cluster Tools ◽

Residency Constraints ◽

Dual Arm ◽

Scheduling Technique

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An optimal scheduling technique for dual-arm cluster tools with buffer modules

2001 IEEE International Conference on Systems, Man and Cybernetics. e-Systems and e-Man for Cybernetics in Cyberspace (Cat.No.01CH37236) ◽

10.1109/icsmc.2001.972958 ◽

2002 ◽

Author(s):

S. Rostami ◽

B. Hamidzadeh

Keyword(s):

Optimal Scheduling ◽

Cluster Tools ◽

Dual Arm ◽

Scheduling Technique

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Optimal scheduling for sequentially connected cluster tools with dual-armed robots and a single input and output module

International Journal of Production Research ◽

10.1080/00207543.2016.1243819 ◽

2016 ◽

Vol 55 (11) ◽

pp. 3092-3109 ◽

Author(s):

Dae-Kyu Kim ◽

Hyun-Jung Kim ◽

Tae-Eog Lee

Keyword(s):

Optimal Scheduling ◽

Input And Output ◽

Cluster Tools ◽

Output Module ◽

Connected Cluster ◽

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Optimal scheduling of single-arm multi-cluster tools with two-space buffering modules

2014 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2014.6899307 ◽

2014 ◽

Author(s):

FaJun Yang ◽

NaiQi Wu ◽

Yan Qiao ◽

MengChu Zhou

Keyword(s):

Optimal Scheduling ◽

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Optimal scheduling of dual-armed cluster tools without swap restriction

2008 IEEE International Conference on Automation Science and Engineering ◽

10.1109/coase.2008.4626564 ◽

2008 ◽

Author(s):

Jin-Heum Paek ◽

Tae-Eog Lee

Keyword(s):

Optimal Scheduling ◽

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Optimal Scheduling of Transient Cycles for Single-Armed Cluster Tools With Parallel Chambers

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2015.2443107 ◽

2016 ◽

Vol 13 (2) ◽

pp. 1165-1175 ◽

Author(s):

Dae-Kyu Kim ◽

Tae-Eog Lee ◽

Hyun-Jung Kim

Keyword(s):

Optimal Scheduling ◽

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