Thin‐film deposition using low‐energy ion beams (3) Mg+ ion‐beam deposition and analysis of deposits

1977 ◽  
Vol 14 (2) ◽  
pp. 695-698 ◽  
Author(s):  
J. Amano ◽  
R. P. W. Lawson
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Thin Film Deposition ◽  
Ion Beams ◽  
Film Deposition ◽  
Low Energy ◽  
Ion Beam Deposition ◽  
Beam Deposition

Thin film deposition using low‐energy ion beams. I. System specification and design

1976 ◽  
Vol 13 (2) ◽  
pp. 591-595 ◽  
Author(s):  
J. Amano ◽  
P. Bryce ◽  
R. P. W. Lawson
Keyword(s):  
Thin Film ◽  
Thin Film Deposition ◽  
Ion Beams ◽  
Film Deposition ◽  
Low Energy ◽  
System Specification

Low energy ion beam assisted grain size evolution in thin film deposition

1997 ◽  
Vol 26 (11) ◽  
pp. 1270-1273 ◽  
Author(s):  
Krishna Rajan ◽  
R. Roy ◽  
J. Trogolo ◽  
J. J. Cuomo
Keyword(s):  
Thin Film ◽  
Grain Size ◽  
Ion Beam ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Low Energy ◽  
Size Evolution
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