Ion–surface interactions during vapor phase crystal growth by sputtering, MBE, and plasma‐enhanced CVD: Applications to semiconductors

Journal of Vacuum Science and Technology ◽

10.1116/1.571767 ◽

1982 ◽

Vol 21 (2) ◽

pp. 285-302 ◽

Author(s):

J. E. Greene ◽

S. A. Barnett

Keyword(s):

Crystal Growth ◽

Vapor Phase ◽

Surface Interactions ◽

Plasma Enhanced Cvd ◽

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Ion-surface interactions during vapor phase crystal growth by sputtering, MBE, and plasma-enhanced CVD: Applications to semiconductors

Vacuum ◽

10.1016/0042-207x(85)90299-4 ◽

1985 ◽

Vol 35 (8) ◽

pp. 346

Keyword(s):

Crystal Growth ◽

Vapor Phase ◽

Surface Interactions ◽

Plasma Enhanced Cvd ◽

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A review of the present understanding of the role of ion/surface interactions and photo-induced reactions during vapor-phase crystal growth

Journal of Crystal Growth ◽

10.1016/0022-0248(86)90411-2 ◽

1986 ◽

Vol 79 (1-3) ◽

pp. 19-32 ◽

Author(s):

J.E. Greene ◽

T. Motooka ◽

J.-E. Sundgren ◽

A. Rockett ◽

S. Gorbatkin ◽

...

Keyword(s):

Crystal Growth ◽

Vapor Phase ◽

Surface Interactions ◽

Phase Crystal ◽

Present Understanding

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Low-Energy Ion/Surface Interactions During Crystal Growth from the Vapor Phase: Effects on Nucleation and Growth, Defect Creation and Annihilation, Microstructure Evolution, and Synthesis of Metastable Phases

Fundamentals ◽

10.1016/b978-0-444-88908-9.50015-2 ◽

1993 ◽

pp. 639-681

Author(s):

J.E. GREENE

Keyword(s):

Crystal Growth ◽

Vapor Phase ◽

Microstructure Evolution ◽

Surface Interactions ◽

Nucleation And Growth ◽

Metastable Phases ◽

Growth Defect ◽

Defect Creation

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Mass Spectrometric Studies of Vapor-Phase Crystal Growth

Journal of The Electrochemical Society ◽

10.1149/1.2404322 ◽

1972 ◽

Vol 119 (6) ◽

pp. 761 ◽

Author(s):

Vladimir S. Ban

Keyword(s):

Crystal Growth ◽

Vapor Phase ◽

Mass Spectrometric ◽

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7509. Molecular dynamics simulations of low-energy particle bombardment effects during vapor-phase crystal growth: 10 eV Si atoms incident on Si(001)2 × 1 surfaces

Vacuum ◽

10.1016/0042-207x(91)91577-b ◽

1991 ◽

Vol 42 (10-11) ◽

pp. 675

Keyword(s):

Molecular Dynamics ◽

Crystal Growth ◽

Molecular Dynamics Simulations ◽

Vapor Phase ◽

Particle Bombardment ◽

Energy Particle ◽

Phase Crystal ◽

Dynamics Simulations

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Mass Spectrometric Studies of Vapor Phase Crystal Growth

Journal of The Electrochemical Society ◽

10.1149/1.2408357 ◽

1971 ◽

Vol 118 (9) ◽

pp. 1473 ◽

Author(s):

Vladimir S. Ban

Keyword(s):

Crystal Growth ◽

Vapor Phase ◽

Mass Spectrometric ◽

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Molecular dynamics simulations of low‐energy particle bombardment effects during vapor‐phase crystal growth: 10 eV Si atoms incident on Si(001)2×1 surfaces

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.576486 ◽

1990 ◽

Vol 8 (5) ◽

pp. 3726-3735 ◽

Author(s):

M. Kitabatake ◽

P. Fons ◽

J. E. Greene

Keyword(s):

Molecular Dynamics ◽

Crystal Growth ◽

Molecular Dynamics Simulations ◽

Vapor Phase ◽

Particle Bombardment ◽

Energy Particle ◽

Phase Crystal ◽

Dynamics Simulations

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Vapor phase crystal growth in the system PbS-Bi2S3

Journal of Crystal Growth ◽

10.1016/0022-0248(72)90046-2 ◽

1972 ◽

Vol 12 (2) ◽

pp. 162-168 ◽

Author(s):

Ernest H. Carlson

Keyword(s):

Crystal Growth ◽

Vapor Phase ◽

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Molecular dynamics and quasidynamics simulations of low‐energy particle bombardment effects during vapor‐phase crystal growth: Production and annihilation of defects due to 50 eV Si incident on (2×1)‐terminated Si(001)

Journal of Applied Physics ◽

10.1063/1.352962 ◽

1993 ◽

Vol 73 (7) ◽

pp. 3183-3194 ◽

Author(s):

M. Kitabatake ◽

J. E. Greene

Keyword(s):

Molecular Dynamics ◽

Crystal Growth ◽

Vapor Phase ◽

Particle Bombardment ◽

Energy Particle ◽

Phase Crystal ◽

Growth Production

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Vapor Phase Crystal Growth of Lead Sulfide Crystals

Journal of Applied Physics ◽

10.1063/1.1721736 ◽

1954 ◽

Vol 25 (6) ◽

pp. 804-805 ◽

Author(s):

Frank Pizzarello

Keyword(s):

Crystal Growth ◽

Vapor Phase ◽

Lead Sulfide ◽

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