Characterization and correction of optical proximity effects in deep-ultraviolet lithography using behavior modeling

1996 ◽  
Vol 14 (6) ◽  
pp. 4175 ◽  
Author(s):  
Anthony Yen
Keyword(s):  
Proximity Effects ◽  
Behavior Modeling ◽  
Ultraviolet Lithography ◽  
Deep Ultraviolet

The Application of Silicon Rich Nitride Films for Use as Deep-Ultraviolet Lithography Phase-Shifting Masks

1998 ◽  
Vol 37 (Part 1, No. 2) ◽  
pp. 571-576 ◽  
Author(s):  
Zhong-Tao Jiang ◽  
Tomuo Yamaguchi ◽  
Kentaro Ohshimo ◽  
Mitsuru Aoyama ◽  
Leo Asinovsky
Keyword(s):  
Phase Shifting ◽  
Ultraviolet Lithography ◽  
Deep Ultraviolet

Nanofabrication with deep-ultraviolet lithography and resolution enhancements

1999 ◽  
Vol 17 (6) ◽  
pp. 3310 ◽  
Author(s):  
M. Fritze ◽  
S. Palmateer ◽  
P. Maki ◽  
J. Knecht ◽  
C. K. Chen ◽  
...  
Keyword(s):  
Ultraviolet Lithography ◽  
Deep Ultraviolet

scholarly journals Fabrication of alignment structures for a fiber resonator by use of deep-ultraviolet lithography

2005 ◽  
Vol 44 (32) ◽  
pp. 6857 ◽  
Author(s):  
Xiyuan Liu ◽  
Karl-Heinz Brenner ◽  
Marco Wilzbach ◽  
Michael Schwarz ◽  
Thomas Fernholz ◽  
...  
Keyword(s):  
Ultraviolet Lithography ◽  
Deep Ultraviolet

A Surface-Silylated Single-Layer Resist Using Chemical Amplification for Deep-Ultraviolet Lithography: I. Limited Permeation of Si Compounds from Vapor Phase*

2000 ◽  
Vol 39 (Part 1, No. 2A) ◽  
pp. 669-674
Author(s):  
Kazuyuki Sugita ◽  
Masakuni Ikagawa ◽  
Kieko Harada ◽  
Masahito Kushida ◽  
Kyoichi Saito
Keyword(s):  
Vapor Phase ◽  
Single Layer ◽  
Ultraviolet Lithography ◽  
Chemical Amplification ◽  
Deep Ultraviolet

Pattern definition employing prism-based deep ultraviolet lithography

2011 ◽  
Vol 6 (3) ◽  
pp. 109 ◽  
Author(s):  
R. Sidharthan ◽  
V.M. Murukeshan
Keyword(s):  
Ultraviolet Lithography ◽  
Deep Ultraviolet
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