The Application of Silicon Rich Nitride Films for Use as Deep-Ultraviolet Lithography Phase-Shifting Masks
1998 ◽
Vol 37
(Part 1, No. 2)
◽
pp. 571-576
◽
1999 ◽
Vol 17
(6)
◽
pp. 3296
◽
1991 ◽
Vol 9
(6)
◽
pp. 3166
◽
2004 ◽
Vol 22
(6)
◽
pp. 3049
◽
1996 ◽
Vol 14
(6)
◽
pp. 4175
◽
1990 ◽
Vol 8
(6)
◽
pp. 1740
◽