In-position optical surface measurement for x-ray projection lithography optics: theory and simulation

1993 ◽  
Author(s):  
Eiichi Seya ◽  
Minoru Hidaka ◽  
Masaaki Ito ◽  
Souichi Katagiri ◽  
Eiji Takeda
Keyword(s):  
Surface Measurement ◽  
Optical Surface ◽  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

Characterization of AZ PN114 resist for soft-x-ray projection lithography

1993 ◽  
Vol 32 (34) ◽  
pp. 7044 ◽  
Author(s):  
K. Early ◽  
D. M. Tennant ◽  
D. Y. Jeon ◽  
P. P. Mulgrew ◽  
A. A. MacDowell ◽  
...  
Keyword(s):  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

Resist performance in 5nm and 13nm soft X-ray projection lithography

1995 ◽  
Vol 27 (1-4) ◽  
pp. 317-320
Author(s):  
Hiroaki Oizumi ◽  
Masayuki Ohtani ◽  
Yoshio Yamashita ◽  
Katsuhiko Murakami ◽  
Hiroshi Nagata ◽  
...  
Keyword(s):  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

The Role of Solid State Lasers in Soft-X-Ray Projection Lithography

1993 ◽  
pp. 247-261
Author(s):  
W. T. Silfvast ◽  
M. C. Richardson ◽  
H. Bender ◽  
A. Hanzo ◽  
V. Yanovsky ◽  
...  
Keyword(s):  
Solid State ◽  
Solid State Lasers ◽  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

Reflection masks for soft x-ray projection lithography

1995 ◽  
Author(s):  
Masaaki Ito ◽  
Takashi Soga ◽  
Hiromasa Yamanashi ◽  
Taro Ogawa
Keyword(s):  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

Multilayer mirror technology for soft-x-ray projection lithography

1993 ◽  
Vol 32 (34) ◽  
pp. 6952 ◽  
Author(s):  
D. G. Stearns ◽  
R. S. Rosen ◽  
S. P. Vernon
Keyword(s):  
X Ray ◽  
Multilayer Mirror ◽  
Projection Lithography ◽  
Ray Projection

Comparison of reflective mask technologies for soft x-ray projection lithography

1992 ◽  
Author(s):  
Donald M. Tennant ◽  
John E. Bjorkholm ◽  
Ludwig Eichner ◽  
Richard R. Freeman ◽  
Tanya E. Jewell ◽  
...  
Keyword(s):  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

PHASE CONJUGATED LASERS APPLIED TO X-RAY GENERATION

1994 ◽  
Vol 03 (02) ◽  
pp. 137-167 ◽  
Author(s):  
L.A. HACKEL ◽  
C.B. DANE ◽  
L.E. ZAPATA ◽  
M.R. HERMANN
Keyword(s):  
Pulse Repetition Frequency ◽  
Average Power ◽  
Experimental Investigations ◽  
High Average Power ◽  
X Ray ◽  
Projection Lithography ◽  
Laser Driver ◽  
Laser Systems ◽  
Frequency Laser ◽  
Ray Projection

Three laser systems that are being developed for use in X-ray generation which incorporate SBS phase conjugate mirrors are described. A 25 J/pulse Nd:glass laser is being developed for commercial proximity print X-ray lithography; a 0.5 J/pulse, 1.3 kHz pulse repetition frequency laser is being built for soft X-ray projection lithography; and a 1 kJ/pulse laser driver for a table top X-ray laser has been designed. The results of prototypical experimental investigations are presented and the basic design principles for high average power phase conjugated laser systems shared by each of these lasers are discussed.

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