PHASE CONJUGATED LASERS APPLIED TO X-RAY GENERATION

1994 ◽  
Vol 03 (02) ◽  
pp. 137-167 ◽  
Author(s):  
L.A. HACKEL ◽  
C.B. DANE ◽  
L.E. ZAPATA ◽  
M.R. HERMANN
Keyword(s):  
Pulse Repetition Frequency ◽  
Average Power ◽  
Experimental Investigations ◽  
High Average Power ◽  
X Ray ◽  
Projection Lithography ◽  
Laser Driver ◽  
Laser Systems ◽  
Frequency Laser ◽  
Ray Projection

Three laser systems that are being developed for use in X-ray generation which incorporate SBS phase conjugate mirrors are described. A 25 J/pulse Nd:glass laser is being developed for commercial proximity print X-ray lithography; a 0.5 J/pulse, 1.3 kHz pulse repetition frequency laser is being built for soft X-ray projection lithography; and a 1 kJ/pulse laser driver for a table top X-ray laser has been designed. The results of prototypical experimental investigations are presented and the basic design principles for high average power phase conjugated laser systems shared by each of these lasers are discussed.

scholarly journals Advanced laser driver for soft x-ray projection lithography

1994 ◽  
Author(s):  
Luis E. Zapata ◽  
Raymond J. Beach ◽  
C. Brent Dane ◽  
Patrick Reichert ◽  
John N. Honig ◽  
...  
Keyword(s):  
X Ray ◽  
Projection Lithography ◽  
Laser Driver ◽  
Ray Projection

scholarly journals Advanced laser driver for soft x-ray projection lithography

1994 ◽  
Author(s):  
L.E. Zapata ◽  
R.J. Beach ◽  
C.B. Dane ◽  
P. Reichert ◽  
J.N. Honig ◽  
...  
Keyword(s):  
X Ray ◽  
Projection Lithography ◽  
Laser Driver ◽  
Ray Projection

Laser driver for soft-x-ray projection lithography

1993 ◽  
Vol 32 (34) ◽  
pp. 6914 ◽  
Author(s):  
Lloyd A. Hackel ◽  
Raymond J. Beach ◽  
C. Brent Dane ◽  
Luis E. Zapata
Keyword(s):  
X Ray ◽  
Projection Lithography ◽  
Laser Driver ◽  
Ray Projection

Characterization of AZ PN114 resist for soft-x-ray projection lithography

1993 ◽  
Vol 32 (34) ◽  
pp. 7044 ◽  
Author(s):  
K. Early ◽  
D. M. Tennant ◽  
D. Y. Jeon ◽  
P. P. Mulgrew ◽  
A. A. MacDowell ◽  
...  
Keyword(s):  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

Compact high-average-power laser-plasma x-ray source by cryogenic target

2001 ◽  
Author(s):  
Takayasu Mochizuki ◽  
Atsushi Shimoura ◽  
Sho Amano ◽  
Shuji Miyamoto
Keyword(s):  
Laser Plasma ◽  
Average Power ◽  
High Average Power ◽  
Power Laser ◽  
X Ray ◽  
Cryogenic Target

YAG:Yb crystal with non-linear doping ions distribution as promising active element for high average power laser systems

Laser Physics ◽  
2021 ◽  
Vol 31 (3) ◽  
pp. 035003
Author(s):  
V A Petrov ◽  
V V Petrov ◽  
G V Kuptsov ◽  
A V Laptev ◽  
V V Galutskiy ◽  
...  
Keyword(s):  
Active Element ◽  
Average Power ◽  
High Average Power ◽  
Power Laser ◽  
Non Linear ◽  
Laser Systems

Resist performance in 5nm and 13nm soft X-ray projection lithography

1995 ◽  
Vol 27 (1-4) ◽  
pp. 317-320
Author(s):  
Hiroaki Oizumi ◽  
Masayuki Ohtani ◽  
Yoshio Yamashita ◽  
Katsuhiko Murakami ◽  
Hiroshi Nagata ◽  
...  
Keyword(s):  
X Ray ◽  
Projection Lithography ◽  
Ray Projection
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