Effect of condenser mirror surface roughness on partially coherent image formation in proximity x-ray lithography

1994 ◽  
Author(s):  
Jiabei Xiao ◽  
Franco Cerrina
2007 ◽  
Author(s):  
O. von Hofsten ◽  
M. Bertilson ◽  
U. Vogt

2007 ◽  
Vol 107 (8) ◽  
pp. 604-609 ◽  
Author(s):  
Olov von Hofsten ◽  
Per A.C. Takman ◽  
Ulrich Vogt

1995 ◽  
Vol 34 (22) ◽  
pp. 4944 ◽  
Author(s):  
L. Jochum ◽  
W. Meyer-Ilse

2003 ◽  
Vol 104 ◽  
pp. 579-582 ◽  
Author(s):  
T. Weitkamp ◽  
C. Rau ◽  
A. Snigirev ◽  
B. Benner ◽  
C. G. Schroer
Keyword(s):  
X Ray ◽  

2000 ◽  
Vol 25 (7) ◽  
pp. 454 ◽  
Author(s):  
Neil A. Beaudry ◽  
Tom D. Milster

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