Effect of condenser mirror surface roughness on partially coherent image formation in proximity x-ray lithography
Keyword(s):
X Ray
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2003 ◽
Vol 104
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pp. 579-582
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Keyword(s):
2010 ◽
1994 ◽
Vol 41
(9)
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pp. 1701-1715
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1991 ◽
Vol 9
(6)
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pp. 3227
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