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Advanced signal processing in a white-light scanning interferometer for exact surface profile measurement
Optical Metrology and Inspection for Industrial Applications V
◽
10.1117/12.2502790
◽
2018
◽
Author(s):
Songjie Luo
◽
Osami Sasaki
◽
Samuel Choi
◽
Takamasa Suzuki
◽
Jixiong Pu
Keyword(s):
Signal Processing
◽
White Light
◽
Surface Profile
◽
Profile Measurement
◽
Scanning Interferometer
◽
Surface Profile Measurement
Download Full-text
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Exact surface profile measurement without subtracting dispersion phase through Fourier transform in a white-light scanning interferometer
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10.1364/ao.57.000894
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Vol 57
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Fringe-scanning white-light microscope for surface profile measurement and material identification
10.1117/12.132119
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1992
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◽
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Keyword(s):
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Thickness and Surface Profile Measurement by a Sinusoidal Wavelength-Scanning Interferometer
Optical Review
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◽
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pp. 319-323
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Author(s):
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Osami Sasaki
◽
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Keyword(s):
Surface Profile
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Profile Measurement
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Wavelength Scanning
◽
Scanning Interferometer
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Surface Profile Measurement
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Surface profile measurement of a diffraction grating by a laser beam scanning interferometer using sinusoidal phase modulation
10.1117/12.2025328
◽
2013
◽
Author(s):
Osami Sasaki
◽
Takuya Kubota
◽
Samuel Choi
◽
Takamasa Suzuki
Keyword(s):
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◽
Diffraction Grating
◽
Phase Modulation
◽
Surface Profile
◽
Profile Measurement
◽
Beam Scanning
◽
Scanning Interferometer
◽
Laser Beam Scanning
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Surface Profile Measurement
Download Full-text
Surface profile measurement in white-light scanning interferometry using a three-chip color CCD
Applied Optics
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10.1364/ao.50.002246
◽
2011
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pp. 2246
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Author(s):
Suodong Ma
◽
Chenggen Quan
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Keyword(s):
White Light
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Surface Profile
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Profile Measurement
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Surface Profile Measurement
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An Algorithm for Discontinuous Surface Profile Measurement using Wavelength Scanning Interferometer
Journal of Control Automation and Systems Engineering
◽
10.5302/j.icros.2003.9.7.507
◽
2003
◽
Vol 9
(7)
◽
pp. 507-514
Keyword(s):
Surface Profile
◽
Profile Measurement
◽
Discontinuous Surface
◽
Wavelength Scanning
◽
Scanning Interferometer
◽
Surface Profile Measurement
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Signal correction by detection of scanning position in a white-light interferometer for exact surface profile measurement
Applied Optics
◽
10.1364/ao.58.003548
◽
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◽
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◽
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◽
...
Keyword(s):
White Light
◽
Surface Profile
◽
Profile Measurement
◽
White Light Interferometer
◽
Signal Correction
◽
Surface Profile Measurement
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Study on the use of white light interferometry for multifiber-end surface profile measurement
Optical Engineering
◽
10.1117/1.2205892
◽
2006
◽
Vol 45
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◽
pp. 055603
◽
Cited By ~ 6
Author(s):
C. Quan
Keyword(s):
White Light
◽
Surface Profile
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Profile Measurement
◽
White Light Interferometry
◽
Surface Profile Measurement
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Fiber-optic interferometer for surface profile measurement with vibration suppression
Optics Express
◽
10.1364/oe.19.004223
◽
2011
◽
Vol 19
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◽
pp. 4223
Author(s):
Taekmin Kwon
◽
Seung-Woo Kim
Keyword(s):
Fiber Optic
◽
Vibration Suppression
◽
Surface Profile
◽
Profile Measurement
◽
Fiber Optic Interferometer
◽
Surface Profile Measurement
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Pre-correction of projected gratings for surface profile measurement
10.1117/12.839317
◽
2008
◽
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◽
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Keyword(s):
Surface Profile
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