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Deposition of multilayer mirrors with arbitrary period thickness distributions
Mapping Intimacies
◽
10.1117/12.505401
◽
2004
◽
Cited By ~ 3
Author(s):
Thomas Foltyn
◽
Stefan Braun
◽
Matthew Moss
◽
Andreas Leson
Keyword(s):
Multilayer Mirrors
◽
Arbitrary Period
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Cited By
References
Interdiffusion in soft X-ray multilayer mirrors
Thin Solid Films
◽
10.1016/s0040-6090(96)08540-9
◽
1996
◽
Vol 286
(1-2)
◽
pp. 176-183
◽
Cited By ~ 5
Author(s):
H.L Bai
◽
E.Y Jiang
◽
C.D Wang
Keyword(s):
Multilayer Mirrors
◽
X Ray
Download Full-text
Calibration of multilayer mirrors for the Multi-Spectral Solar Telescope Array II
10.1117/12.212609
◽
1995
◽
Cited By ~ 1
Author(s):
Charles C. Kankelborg
◽
James E. Plummer
◽
Dennis S. Martinez-Galarce
◽
Ray H. O'Neal
◽
Craig E. DeForest
◽
...
Keyword(s):
Solar Telescope
◽
Multilayer Mirrors
◽
Telescope Array
Download Full-text
Plasma treatment for restoration of dielectric multilayer mirrors in short-wavelength free-electron lasers
Applied Optics
◽
10.1364/ao.34.004261
◽
1995
◽
Vol 34
(21)
◽
pp. 4261
◽
Cited By ~ 6
Author(s):
Kawakatsu Yamada
◽
Tetsuo Yamazaki
◽
Takashi Shimizu
◽
Norihiro Sei
◽
Tomohisa Mikado
Keyword(s):
Plasma Treatment
◽
Free Electron
◽
Short Wavelength
◽
Free Electron Lasers
◽
Multilayer Mirrors
◽
Dielectric Multilayer
Download Full-text
Low-loss semiconductor hollow waveguide with GaAs/AlAs multilayer mirrors for widely tunable waveguide devices
The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, 2003. LEOS 2003.
◽
10.1109/leos.2003.1253061
◽
2004
◽
Cited By ~ 1
Author(s):
T. Miura
◽
F. Koyama
Keyword(s):
Hollow Waveguide
◽
Low Loss
◽
Multilayer Mirrors
◽
Waveguide Devices
◽
Tunable Waveguide
Download Full-text
Toward the In Situ Remediation of Carbon Deposition on Ru-Capped Multilayer Mirrors Intended for EUV Lithography: Exploiting the Electron-Induced Chemistry
The Journal of Physical Chemistry C
◽
10.1021/jp074766y
◽
2007
◽
Vol 111
(33)
◽
pp. 12165-12168
◽
Cited By ~ 8
Author(s):
David J. Davis
◽
Georgios Kyriakou
◽
Robert B. Grant
◽
Mintcho S. Tikhov
◽
Richard M. Lambert
Keyword(s):
Carbon Deposition
◽
In Situ Remediation
◽
Multilayer Mirrors
◽
Euv Lithography
Download Full-text
Soft X-Ray Optics Using Multilayer Mirrors
Optical Engineering
◽
10.1117/12.7973449
◽
1985
◽
Vol 24
(1)
◽
Author(s):
Ping Lee
◽
Roger J. Bartlett
◽
Don R. Kania
Keyword(s):
Multilayer Mirrors
◽
Ray Optics
◽
X Ray
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Correlation of sidelobe suppression between rugate filters and multilayer mirrors
Applied Optics
◽
10.1364/ao.46.007776
◽
2007
◽
Vol 46
(31)
◽
pp. 7776
◽
Cited By ~ 3
Author(s):
Bicher Haj Ibrahim
◽
Roelene Botha
◽
Jean-Eric Bourée
◽
Pavel Bulkin
◽
Bernard Drévillon
Keyword(s):
Sidelobe Suppression
◽
Multilayer Mirrors
Download Full-text
Aging effect of Co/C soft X-ray multilayer mirrors
Chinese Science Bulletin
◽
10.1007/bf02882590
◽
1997
◽
Vol 42
(6)
◽
pp. 454-457
◽
Cited By ~ 1
Author(s):
Haili Bai
◽
Enyong Jiang
◽
Renyu Tian
◽
Cunda Wang
Keyword(s):
Aging Effect
◽
Multilayer Mirrors
◽
X Ray
Download Full-text
Structure and scattering properties of Ni_80Nb_20-MgO water-window multilayer mirrors
Applied Optics
◽
10.1364/ao.42.003297
◽
2003
◽
Vol 42
(16)
◽
pp. 3297
Author(s):
Satish Vitta
◽
Martin Weisheit
◽
Hans-Ulrich Krebs
Keyword(s):
Multilayer Mirrors
◽
Water Window
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Si adhesion interlayer effects in hydrogen passivated Si/W soft X-ray multilayer mirrors
Surface Science
◽
10.1016/j.susc.2006.01.046
◽
2006
◽
Vol 600
(6)
◽
pp. 1405-1408
◽
Cited By ~ 2
Author(s):
M.J.H. Kessels
◽
J. Verhoeven
◽
F.D. Tichelaar
◽
F. Bijkerk
Keyword(s):
Multilayer Mirrors
◽
X Ray
Download Full-text
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