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Improved chemically amplified photoresist characterization using interdigitated electrode sensors: photoacid diffusivity measurements
Mapping Intimacies
◽
10.1117/12.536218
◽
2004
◽
Cited By ~ 3
Author(s):
Cody M. Berger
◽
Clifford L. Henderson
Keyword(s):
Interdigitated Electrode
◽
Chemically Amplified
◽
Diffusivity Measurements
◽
Chemically Amplified Photoresist
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Cited By
References
Effect of film composition on the performance of interdigitated electrode methods used for chemically amplified photoresist characterization: methods for analyzing photoresist materials containing base quencher
10.1117/12.607437
◽
2005
◽
Cited By ~ 1
Author(s):
Cody Berger
◽
Clifford L. Henderson
Keyword(s):
Interdigitated Electrode
◽
Film Composition
◽
Characterization Methods
◽
Chemically Amplified
◽
Chemically Amplified Photoresist
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Modeling and simulations of a positive chemically amplified photoresist for x-ray lithography
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
◽
10.1116/1.587571
◽
1994
◽
Vol 12
(6)
◽
pp. 3900
◽
Cited By ~ 12
Author(s):
A. A. Krasnoperova
Keyword(s):
Modeling And Simulations
◽
X Ray
◽
Chemically Amplified
◽
Chemically Amplified Photoresist
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Novel hardening methods of DUV chemically amplified photoresist by ion implantation and its application to new organic ARC material and bilayer process
10.1117/12.350190
◽
1999
◽
Cited By ~ 2
Author(s):
Jun-Sung Chun
◽
Hung-Eil Kim
◽
Stanley Barnett
◽
James Shih
Keyword(s):
Ion Implantation
◽
Chemically Amplified
◽
Chemically Amplified Photoresist
Download Full-text
INR negative resist: a negative-tone I-line chemically amplified photoresist
10.1117/12.175347
◽
1994
◽
Cited By ~ 1
Author(s):
Leo L. Linehan
◽
Gary T. Spinillo
◽
Randolph S. Smith
◽
Wayne M. Moreau
◽
Barry C. McCormick
◽
...
Keyword(s):
Chemically Amplified
◽
Chemically Amplified Photoresist
◽
Negative Tone
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Performance of a 55-micron copper pillar bump process using a positive thick chemically amplified photoresist
10.1117/12.711606
◽
2007
◽
Author(s):
Dennis Crapse
◽
Warren W. Flack
◽
Ha-Ai Nguyen
◽
Elliott Capsuto
◽
Craig McEwen
Keyword(s):
Chemically Amplified
◽
Chemically Amplified Photoresist
Download Full-text
Effect of surfactant-added developer on development of the chemically amplified photoresist
10.1117/12.388358
◽
2000
◽
Author(s):
Satoshi Kawada
◽
Yukio Tamai
◽
Shunkichi Omae
◽
Tadahiro Ohmi
Keyword(s):
Chemically Amplified
◽
Chemically Amplified Photoresist
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Spatially programmable temperature control and measurement for chemically amplified photoresist processing
10.1117/12.361326
◽
1999
◽
Cited By ~ 23
Author(s):
Charles D. Schaper
◽
Khalid A. El-Awady
◽
Arthur E. Tay
Keyword(s):
Temperature Control
◽
Chemically Amplified
◽
Chemically Amplified Photoresist
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Chemically Amplified Photoresist for Electron Beam Lithography
Journal of Photopolymer Science and Technology
◽
10.2494/photopolymer.16.451
◽
2003
◽
Vol 16
(3)
◽
pp. 451-454
◽
Cited By ~ 1
Author(s):
Youngmin Choi
◽
Sang-Wook Park
◽
Yongil Kim
◽
Haiwon Lee
Keyword(s):
Electron Beam
◽
Electron Beam Lithography
◽
Chemically Amplified
◽
Chemically Amplified Photoresist
Download Full-text
Synthesis of chemically amplified photoresist polymer containing four (Meth)acrylate monomers via RAFT polymerization and its application for KrF lithography
Journal of Polymer Research
◽
10.1007/s10965-016-0996-3
◽
2016
◽
Vol 23
(5)
◽
Cited By ~ 2
Author(s):
Hu Li
◽
Jingcheng Liu
◽
Xiangfei Zheng
◽
Changwei Ji
◽
Qidao Mu
◽
...
Keyword(s):
Raft Polymerization
◽
Chemically Amplified
◽
Chemically Amplified Photoresist
◽
Acrylate Monomers
Download Full-text
Lithographic performance of an environmentally stable chemically amplified photoresist (ESCAP)
10.1117/12.241840
◽
1996
◽
Cited By ~ 6
Author(s):
Will Conley
◽
Gregory Breyta
◽
William R. Brunsvold
◽
Richard A. Di Pietro
◽
Donald C. Hofer
◽
...
Keyword(s):
Chemically Amplified
◽
Chemically Amplified Photoresist
Download Full-text
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