chemically amplified photoresist
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scholarly journals Improvement of Environment Stability of an i-Line Chemically Amplified Photoresist

2021 ◽  
Vol 4 (2) ◽  
pp. 1-9
Author(s):  
Haibo Li ◽  
◽  
Qian Yang ◽  
Jia Sun ◽  
Jie Li ◽  
...  
Keyword(s):  
Chemically Amplified ◽  
Chemically Amplified Photoresist

scholarly journals Patterning highly ordered arrays of complex nanofeatures through EUV directed polarity switching of non chemically amplified photoresist

2016 ◽  
Vol 6 (1) ◽  
Author(s):  
Subrata Ghosh ◽  
V. S. V. Satyanarayana ◽  
Bulti Pramanick ◽  
Satinder K. Sharma ◽  
Chullikkattil P. Pradeep ◽  
...  
Keyword(s):  
Ordered Arrays ◽  
Chemically Amplified ◽  
Polarity Switching ◽  
Chemically Amplified Photoresist

Effect of polymer matrix and photoacid generator on the lithographic properties of chemically amplified photoresist

2014 ◽  
Vol 43 (6) ◽  
pp. 392-400 ◽  
Author(s):  
S. A. Bulgakova ◽  
D. A. Gurova ◽  
S. D. Zaitsev ◽  
E. E. Kulikov ◽  
E. V. Skorokhodov ◽  
...  
Keyword(s):  
Polymer Matrix ◽  
Chemically Amplified ◽  
Chemically Amplified Photoresist ◽  
Photoacid Generator

Chemically amplified photoresist for high resolution autoradiography in targeted radiotherapy

Biomaterials ◽  
2011 ◽  
Vol 32 (26) ◽  
pp. 6138-6144 ◽  
Author(s):  
Nadia Falzone ◽  
Roger Nathan ◽  
Sverre Myhra ◽  
Radka Chakalova ◽  
Thomas Altebaeumer ◽  
...  
Keyword(s):  
High Resolution ◽  
Targeted Radiotherapy ◽  
Chemically Amplified ◽  
High Resolution Autoradiography ◽  
Chemically Amplified Photoresist

scholarly journals Large refractive index changes of a chemically amplified photoresist in femtosecond laser nonlinear lithography

2011 ◽  
Vol 19 (8) ◽  
pp. 7673 ◽  
Author(s):  
Mizue Mizoshiri ◽  
Yoshinori Hirata ◽  
Junji Nishii ◽  
Hiroaki Nishiyama
Keyword(s):  
Refractive Index ◽  
Femtosecond Laser ◽  
Chemically Amplified ◽  
Index Changes ◽  
Chemically Amplified Photoresist

A study of an acid-induced defect on chemically amplified photoresist applied to sub-30nm NAND flash memory

2011 ◽  
Author(s):  
Yong-Hyun Lim ◽  
Jae-Doo Eom ◽  
Woo-Yung Jung ◽  
Min-Sik Jang ◽  
Byung-Seok Lee ◽  
...  
Keyword(s):  
Flash Memory ◽  
Nand Flash ◽  
Nand Flash Memory ◽  
Chemically Amplified ◽  
Chemically Amplified Photoresist
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