Surface defect inspection system with an optical spatial frequency filter for semiconductor patterned wafers

Mapping Intimacies ◽

10.1117/12.59810 ◽

1992 ◽

Author(s):

Yoko Miyazaki ◽

Hitoshi Tanaka ◽

Nobuyuki Kosaka ◽

Toshimasa Tomoda

Keyword(s):

Spatial Frequency ◽

Surface Defect ◽

Inspection System ◽

Frequency Filter ◽

Defect Inspection ◽

Patterned Wafers

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Defect inspection system for patterned wafers based on the spatial-frequency filtering

[1991 Proceedings] Eleventh IEEE/CHMT International Electronics Manufacturing Technology Symposium ◽

10.1109/iemt.1991.279775 ◽

2002 ◽

Author(s):

T. Ohshige ◽

H. Tanaka ◽

Y. Miyazaki ◽

T. Kanda ◽

H. Ichimura ◽

...

Keyword(s):

Spatial Frequency ◽

Inspection System ◽

Frequency Filtering ◽

Defect Inspection ◽

Patterned Wafers ◽

Spatial Frequency Filtering

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A deep learning-based surface defect inspection system using multi-scale and channel-compressed features

IEEE Transactions on Instrumentation and Measurement ◽

10.1109/tim.2020.2986875 ◽

2020 ◽

pp. 1-1

Author(s):

Jiangxin Yang ◽

Guizhong Fu ◽

Wenbin Zhu ◽

Yanlong Cao ◽

Yanpeng Cao ◽

...

Keyword(s):

Deep Learning ◽

Surface Defect ◽

Inspection System ◽

Defect Inspection ◽

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Design and simulation on surface defect inspection system of micro ring parts

2011 IEEE International Conference on Mechatronics and Automation ◽

10.1109/icma.2011.5985840 ◽

2011 ◽

Author(s):

Xiaozhou Li ◽

Yan Li ◽

Huadong Yu ◽

Jinkai Xu ◽

Zhanjiang Yu

Keyword(s):

Surface Defect ◽

Inspection System ◽

Defect Inspection

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A Deep Learning-Based Surface Defect Inspection System for Smartphone Glass

Intelligent Data Engineering and Automated Learning – IDEAL 2019 - Lecture Notes in Computer Science ◽

10.1007/978-3-030-33607-3_41 ◽

2019 ◽

pp. 375-385 ◽

Author(s):

Gwang-Myong Go ◽

Seok-Jun Bu ◽

Sung-Bae Cho

Keyword(s):

Deep Learning ◽

Surface Defect ◽

Inspection System ◽

Defect Inspection

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Development of a surface defect inspection system using radiant light from steel products in a hot rolling line

IEEE Transactions on Instrumentation and Measurement ◽

10.1109/19.744183 ◽

1998 ◽

Vol 47 (2) ◽

pp. 409-416 ◽

Author(s):

T. Sugimoto ◽

T. Kawaguchi

Keyword(s):

Hot Rolling ◽

Surface Defect ◽

Inspection System ◽

Defect Inspection ◽

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Development of Surface Defect Inspection System Using Detecting Self-Radiation Light for Large Section Steel Products

Transactions of the Society of Instrument and Control Engineers ◽

10.9746/sicetr1965.27.516 ◽

1991 ◽

Vol 27 (5) ◽

pp. 516-523

Author(s):

Takao SUGIMOTO ◽

Tadao KAWAGUCHI ◽

Youichi FUJIKAKE

Keyword(s):

Surface Defect ◽

Inspection System ◽

Defect Inspection ◽

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A cost-effective and automatic surface defect inspection system for hot-rolled flat steel

Robotics and Computer-Integrated Manufacturing ◽

10.1016/j.rcim.2015.09.008 ◽

2016 ◽

Vol 38 ◽

pp. 16-30 ◽

Author(s):

Qiwu Luo ◽

Yigang He

Keyword(s):

Surface Defect ◽

Cost Effective ◽

Inspection System ◽

Defect Inspection ◽

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BMW to use automatic surface defect inspection system for sprayed car parts

Sensor Review ◽

10.1108/sr.2008.08728daf.004 ◽

2008 ◽

Vol 28 (4) ◽

Keyword(s):

Surface Defect ◽

Inspection System ◽

Defect Inspection

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Automated surface defect inspection system for capacitive touch sensor

2015 7th International Conference of Soft Computing and Pattern Recognition (SoCPaR) ◽

10.1109/socpar.2015.7492820 ◽

2015 ◽

Author(s):

Yu-Min Chiang ◽

Yih-Lon Lin ◽

Wei-Hong Chien

Keyword(s):

Surface Defect ◽

Inspection System ◽

Defect Inspection ◽

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Surface Defect Inspection System for Hot Slabs

Journal of Institute of Control Robotics and Systems ◽

10.5302/j.icros.2016.16.0048 ◽

2016 ◽

Vol 22 (8) ◽

pp. 627-632

Author(s):

Jong Pil Yun ◽

Daewoong Jung ◽

Changhyun Park

Keyword(s):

Surface Defect ◽

Inspection System ◽

Defect Inspection

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