Defect inspection system for patterned wafers based on the spatial-frequency filtering

2002 ◽  
Author(s):  
T. Ohshige ◽  
H. Tanaka ◽  
Y. Miyazaki ◽  
T. Kanda ◽  
H. Ichimura ◽  
...  
Keyword(s):  
Spatial Frequency ◽  
Inspection System ◽  
Frequency Filtering ◽  
Defect Inspection ◽  
Patterned Wafers ◽  
Spatial Frequency Filtering

Compact Incoherent Spatial Frequency Filtering Enabled by Metasurface Engineering

2021 ◽  
Author(s):  
Dean S. Hazineh ◽  
Qi Guo ◽  
Zhujun Shi ◽  
Yao-Wei Huang ◽  
Todd Zickler ◽  
...  
Keyword(s):  
Spatial Frequency ◽  
Frequency Filtering ◽  
Spatial Frequency Filtering
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