ScienceGate
Advanced Search
Author Search
Journal Finder
Blog
Sign in / Sign up
ScienceGate
Search
Author Search
Journal Finder
Blog
Sign in / Sign up
Influence of partially coherent illumination on aerial-image-based aberration measurement of projection optics in lithographic tools
Mapping Intimacies
◽
10.1117/12.837770
◽
2009
◽
Author(s):
Tingting Zhou
◽
Shiyuan Liu
◽
Wei Liu
◽
Lijuan Wang
Keyword(s):
Aerial Image
◽
Partially Coherent
◽
Coherent Illumination
◽
Projection Optics
Download Full-text
Related Documents
Cited By
References
Optimization analysis of partially coherent illumination for refractive index tomographic microscopy
Optics and Lasers in Engineering
◽
10.1016/j.optlaseng.2021.106624
◽
2021
◽
Vol 143
◽
pp. 106624
Author(s):
Jiaji Li
◽
Ning Zhou
◽
Zhidong Bai
◽
Shun Zhou
◽
Qian Chen
◽
...
Keyword(s):
Refractive Index
◽
Optimization Analysis
◽
Partially Coherent
◽
Coherent Illumination
Download Full-text
Holography with partially coherent illumination
Physics Letters A
◽
10.1016/0375-9601(69)90470-8
◽
1969
◽
Vol 28
(9)
◽
pp. 623-624
◽
Cited By ~ 7
Author(s):
W. Mirandé
◽
I. Weingärtner
Keyword(s):
Partially Coherent
◽
Coherent Illumination
Download Full-text
In-Flow Imaging by Multispectral Digital Holographic Microscopy with Partially Coherent Illumination
Imaging and Applied Optics 2015
◽
10.1364/isa.2015.ith2a.1
◽
2015
◽
Author(s):
Jérôme Dohet-Eraly
◽
Catherine Yourassowsky
◽
Frank Dubois
Keyword(s):
Digital Holographic Microscopy
◽
Flow Imaging
◽
Partially Coherent
◽
Holographic Microscopy
◽
Coherent Illumination
Download Full-text
Experimental analysis and designing strategies of lens-less microscopy with partially coherent illumination
Optics Communications
◽
10.1016/j.optcom.2018.10.035
◽
2019
◽
Vol 434
◽
pp. 136-144
◽
Cited By ~ 1
Author(s):
Yinxu Bian
◽
Wensheng Wang
◽
Anwar Hussian
◽
Cuifang Kuang
◽
Haifeng Li
◽
...
Keyword(s):
Experimental Analysis
◽
Partially Coherent
◽
Coherent Illumination
Download Full-text
Measuring the Complex Amplitude of Wave Fields by Means of Phase Retrieval Using Partially Coherent Illumination
Fringe 2013
◽
10.1007/978-3-642-36359-7_47
◽
2014
◽
pp. 283-287
Author(s):
Mostafa Agour
◽
Khaled Elshaffey
◽
Christoph von Kopylow
◽
Ralf B. Bergmann
◽
Claas Falldorf
Keyword(s):
Phase Retrieval
◽
Complex Amplitude
◽
Wave Fields
◽
Partially Coherent
◽
Coherent Illumination
Download Full-text
Trefoil Aberration Measurement of Lithographic Projection Optics Based on Linewidth Asymmetry of the Aerial Image
ECS Transactions
◽
10.1149/1.3096474
◽
2019
◽
Vol 18
(1)
◽
pp. 373-379
Author(s):
Qiongyan Yuan
◽
Xiangzhao Wang
◽
Zicheng Qiu
Keyword(s):
Aerial Image
◽
Projection Optics
Download Full-text
Label‐free bioanalysis of Leishmania infantum using refractive index tomography with partially coherent illumination
Journal of Biophotonics
◽
10.1002/jbio.201900030
◽
2019
◽
Vol 12
(9)
◽
Cited By ~ 2
Author(s):
Juan M. Soto
◽
Alicia Mas
◽
José A. Rodrigo
◽
Tatiana Alieva
◽
Gustavo Domínguez‐Bernal
Keyword(s):
Refractive Index
◽
Leishmania Infantum
◽
Label Free
◽
Partially Coherent
◽
Coherent Illumination
Download Full-text
Microscopic phase reconstruction of cervical exfoliated cell under partially coherent illumination
Journal of Biophotonics
◽
10.1002/jbio.202000401
◽
2020
◽
Vol 14
(1)
◽
Author(s):
Xingyuan Lu
◽
Zhuoyi Wang
◽
Suxia Zhang
◽
A. P. Konijnenberg
◽
Yiqin Ouyang
◽
...
Keyword(s):
Phase Reconstruction
◽
Partially Coherent
◽
Coherent Illumination
Download Full-text
Effect on the Spatial Frequency Contents of the Object of Reducing Speckle in Partially Coherent Illumination
Japanese Journal of Applied Physics
◽
10.7567/jjaps.14s1.317
◽
1975
◽
Vol 14
(S1)
◽
pp. 317
◽
Cited By ~ 1
Author(s):
Y. Ichioka
◽
K. Yamamoto
◽
T. Suzuki
Keyword(s):
Spatial Frequency
◽
Partially Coherent
◽
Coherent Illumination
Download Full-text
Near field hologram registration with partially coherent illumination
Optics Communications
◽
10.1016/j.optcom.2004.04.003
◽
2004
◽
Vol 237
(4-6)
◽
pp. 235-242
◽
Cited By ~ 9
Author(s):
Tomasz Kozacki
◽
Romuald Jóźwicki
Keyword(s):
Near Field
◽
Partially Coherent
◽
Coherent Illumination
Download Full-text
Sign in / Sign up
Close
Export Citation Format
Close
Share Document
Close